A transverse mems piezoelectric-electrostatic coupling energy harvester and processing method

Abstract

The invention discloses a MEMS technology-based transverse vibration energy harvesting device. The transverse vibration energy harvesting device comprises an electrostatic harvesting unit and a piezoelectric harvesting unit; and the electrostatic harvesting unit and the piezoelectric harvesting unit are not subjected to simple physical superposition and are subjected to deep coupling. A piezoelectric energy harvesting unit provides an electrostatic energy harvesting unit with necessary initial electrostatic charges for working, so that the electrostatic energy harvesting unit gets rid of the bondage of a battery to achieve passivation. The electrostatic energy harvesting unit is an MEMS variable capacitor; the MEMS variable capacitor alternates in the vibration process and charges producedby a piezoelectric body also alternate at the same time; piezoelectric charges can be more effectively extracted to the MEMS variable capacitor through reasonable electric connection and electrical on-off control of the MEMS variable capacitor and the piezoelectric body; and an energy storage capacitor can be more effectively charged by boosting through the MEMS variable capacitor. The inventionfurther provides a processing method of the MEMS technology-based transverse vibration energy harvesting device.

Description

technical field [0001] The invention relates to a MEMS vibration energy collector, in particular to a transverse MEMS piezoelectric-electrostatic coupling energy collector and a processing method. Background technique [0002] MEMS sensors, especially environmental monitoring sensors, traffic flow monitoring sensors, building vibration monitoring sensors, and national defense border monitoring sensors, all need to work continuously for several years in an environment without power support without maintenance, or even maintenance-free for life. Therefore, while reducing the power consumption of related sensors, the addition of MEMS energy harvesting devices in the sensor system can capture energy from the environment to increase the service life of MEMS sensors. Mechanical vibration is a source of energy that exists widely in the environment. MEMS vibration energy harvesters are MEMS devices that convert mechanical vibration energy into electrical energy. The basic conversion...

AI Technical Summary

Problems solved by technology

The MEMS vibration energy harvester through a single energy conversion method cannot fully utilize the chip area for energy conversion, so the energy conversion efficiency of this type of MEMS vibration energy harvester is low

In addition, MEMS vibration energy harvesting devices using electrostatic principles usually require external battery power supply, so their energy harvesting cost-effectiveness is relatively low

Some researchers have improved the energy harvesting efficiency of MEMS vibration energy harvesters through low-frequency-high-frequency conversion, but they have not essentially improved the efficiency of the energy conversion mechanism (CN201611115545.2)

Some other researchers tried to integrate two energy conversion mechanisms in the same energy harvester (CN201320435852.4), but only limited to sharing the chip area in space, and the two energy harvesting components did not cooperate with each other to achieve the effect of coupling efficiency

Images