Film thickness detection device and vacuum evaporating machine
A detection device and film thickness technology, applied in vacuum evaporation plating, sputtering plating, ion implantation plating, etc., can solve problems such as low production efficiency and clogging, and achieve the goal of improving production efficiency, avoiding cooling, and reducing clogging Effect
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[0023] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.
[0024] see figure 1 and figure 2 , the present invention provides a film thickness detection device for detecting the evaporation rate of the substrate 100 when the substrate 100 is evaporated, comprising an evaporation source 10, an adjustment part 20, a film thickness detector 30, a gas pipeline 50 and a heating part 60, the evaporation source 10 has a nozzle 101, the nozzle 101, the gas pipeline 50, the adjustment part 20 and the film thickness detector 30 are...
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