Film thickness detection device and vacuum evaporating machine

A detection device and film thickness technology, applied in vacuum evaporation plating, sputtering plating, ion implantation plating, etc., can solve problems such as low production efficiency and clogging, and achieve the goal of improving production efficiency, avoiding cooling, and reducing clogging Effect

Active Publication Date: 2018-07-13
WUHAN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0004] The object of the present invention is to provide a film thickness detection device and an evaporation machine to solve the technical problem of low production efficiency caused by the blocking of the evaporation material to the through hole

Method used

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  • Film thickness detection device and vacuum evaporating machine
  • Film thickness detection device and vacuum evaporating machine
  • Film thickness detection device and vacuum evaporating machine

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Embodiment Construction

[0023] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0024] see figure 1 and figure 2 , the present invention provides a film thickness detection device for detecting the evaporation rate of the substrate 100 when the substrate 100 is evaporated, comprising an evaporation source 10, an adjustment part 20, a film thickness detector 30, a gas pipeline 50 and a heating part 60, the evaporation source 10 has a nozzle 101, the nozzle 101, the gas pipeline 50, the adjustment part 20 and the film thickness detector 30 are...

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Abstract

The invention provides a film thickness detection device. The film thickness detection device is used for detecting an evaporation rate of a substrate plate when the substrate plate is evaporated. Thefilm thickness detection device comprises an evaporation source, the film thickness detector, an adjusting part, a gas pipeline and a heating part, wherein the evaporation source is provided with a nozzle; the nozzle, the gas pipeline, the adjusting part and the film thickness detector are arranged at a first direction in sequence; the nozzle communicates with a material feeding port of the gas pipeline, the adjusting part can rotate around a fixed shaft, and a plurality of through holes which are arranged at intervals are formed in the adjusting part; and the heating part is arranged aroundthe periphery of the gas pipeline, and then a vacuum evaporated material evaporated from the nozzle is kept in a gas state when passes through the gas pipeline in the first direction, and is vacuum evaporated on the film thickness detector through the through holes. According to the film thickness detection device and the vacuum evaporating machine, the technical problem that the production efficiency is low due to the fact that blockage of the through holes caused by the vacuum evaporated material is solved.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a film thickness detection device and an evaporation machine. Background technique [0002] Organic light-emitting diode (Organic Light-Emitting Diode, OLED) display, also known as organic electroluminescent display, is a new type of flat panel display device, due to its simple preparation process, low cost, low power consumption, high luminance, Wide range of working temperature, light and thin size, fast response speed, easy to realize color display and large-screen display, easy to realize matching with integrated circuit driver, easy to realize flexible display, etc., so it has broad application prospects. [0003] At present, the mainstream OLED preparation method is the evaporation method, that is, the organic small molecule material is heated in the cavity of the OLED evaporation machine to sublimate or melt and gasify it into a material vapor, which is deposited on the s...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24C23C14/54C23C14/12
CPCC23C14/12C23C14/24C23C14/545
Inventor 黄鹏
Owner WUHAN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
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