Production method of Fano-resonance-based nano optical waveguide accelerometer

An accelerometer and nano-light technology, applied in the direction of acceleration measurement using inertial force, can solve problems such as the inability to meet the needs of high-sensitivity accelerometers, and achieve the effects of perfect compatibility with CMOS technology, fast response speed, and high resolution

Inactive Publication Date: 2018-07-13
ZHONGBEI UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Traditional MEMS accelerometers are limited by the environment, volume and their own properties, and cannot meet the needs of modern industry and military development for high-sensitivity accelerometers

Method used

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  • Production method of Fano-resonance-based nano optical waveguide accelerometer
  • Production method of Fano-resonance-based nano optical waveguide accelerometer
  • Production method of Fano-resonance-based nano optical waveguide accelerometer

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Embodiment Construction

[0034] The accelerometer uses SOI material as the sensitive element and base material. The SOI material includes a top layer of silicon 8, a middle silicon dioxide layer 9 and a base silicon 10. On the top layer of silicon 8, a straight waveguide 1, a Y waveguide 2, a ring cavity 6 and a grating 11 are formed. ; The cantilever beam 3 and the detection mass block 4 are formed on the middle silicon dioxide layer 9; the electrode 5, the input unit 12, and the detection unit 7 form a conditioning circuit. The straight waveguide 1 , the cantilever beam 3 , the ring cavity 6 and the grating 11 are integrated together, and this integrated structure helps to reduce the loss caused by the interconnection and coupling of separate components.

[0035] According to the manufacturing process of the accelerometer provided by the present invention, it is mainly divided into two processes: the preparation of the ring resonant cavity and the release of the cantilever beam, and finally use the o...

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Abstract

The invention relates to a principle and manufacture process of a Fano-resonance-based nano optical waveguide accelerometer, particularly belongs to the field of optics and the field of micro-opticalelectromechanical systems, and particularly relates to a production method of a Fano-resonance-based nano optical waveguide accelerometer. The production method employs SOI material as sensitive element and substrate material; based on the high sensitivity of a high-Q optical micro-ring cavity and the advantages of the SOI material, such as high reflectivity, high optical limiting capacity, low transmission loss and good convenience of integration, an integrated nano optical waveguide process is used, and a Fano-resonance-based nano optical waveguide accelerometer is provided; the optical accelerometer with high sensitivity and good impact resistance is implemented through mechanics-optics coupling effect.

Description

technical field [0001] The invention relates to the principle and manufacturing process of a nano-optical waveguide accelerometer based on Fano resonance, specifically belongs to the fields of optics and micro-opto-electromechanical systems, and specifically relates to a preparation method of a nano-optical waveguide accelerometer based on Fano resonance. Background technique [0002] An accelerometer is an inertial device used to measure acceleration and is the core measurement unit of an inertial navigation system that does not depend on satellites. From automotive airbag system control, earthquake monitoring, to inertial navigation systems of aviation, spacecraft and driverless cars, to gravity sensing and automatic screen rotation functions of mobile phones and tablets, etc., the role of accelerometers is inseparable. Counting has become an essential part of our daily lives. [0003] Traditional MEMS accelerometers are limited by the environment, volume and their own pr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/02
CPCG01P15/02
Inventor 闫树斌张彦军韵力宇李云超张志东崔建功李国洪冯登超胡旭文
Owner ZHONGBEI UNIV
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