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A precision loaded piezoelectric linear motor and its driving method

A linear motor, piezoelectric technology, applied in the direction of generator/motor, piezoelectric effect/electrostrictive or magnetostrictive motor, electrical components, etc. Achieve the effect of improving output performance, output speed, and output force

Active Publication Date: 2019-08-13
CHANGCHUN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In order to solve the technical problems that the current ultra-precision driving technology is difficult to realize large-stroke and high-precision precision driving, the invention discloses a precision-loaded piezoelectric linear motor and its driving method

Method used

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  • A precision loaded piezoelectric linear motor and its driving method
  • A precision loaded piezoelectric linear motor and its driving method
  • A precision loaded piezoelectric linear motor and its driving method

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specific Embodiment approach

[0024] Specific implementation: combination Figure 1~Figure 9 To explain this embodiment, this embodiment provides a precision-loaded piezoelectric linear motor and a driving method thereof. The piezoelectric stick-slip driver using double ceramic polybeam flexure hinges includes a base 1, a guide rail assembly 2, a mounting screw I3, a stator assembly 4, a mounting screw II5, a guide mechanism 6, a baffle plate 7, a fixing screw I8, and a thread pair 9 and locking screw 10. The guide rail assembly 2 is screwed and fixed on the base 1 through a mounting screw I3 and a mounting screw hole I1-2; the guide mechanism 6 is placed inside the base 1 and is in sliding contact with the inner surface 1-4 of the base; the baffle 7 It is screwed and fixed on the side of the base 1 through the fixing screw I8 and the fixing screw hole I1-5; the thread pair 9 is glued to the baffle 7; the stator assembly 4 is screwed through the mounting screw II5 and the mounting screw hole II6-3- 1 The ...

specific Embodiment approach 2

[0029] Specific implementation manner two: combination Picture 10 To describe this embodiment, this embodiment provides a specific implementation of a precision-loaded piezoelectric linear motor driving method. The driving method of the precision-loaded piezoelectric linear motor is as follows.

[0030] The composite excitation electrical signal used in the driving method is realized. The composite excitation electrical signal includes a friction control wave and a drive wave. By superimposing the friction control wave on the fast energization phase of the drive wave, the excitation stator assembly is in the microscopic phase during the 4 fast deformation stages. In the secondary high frequency resonance state, the frictional resistance between the stator assembly 4 and the guide rail assembly 2 in the rapid deformation stage is reduced based on the ultrasonic anti-friction effect; the driving wave is a sawtooth wave, the friction control wave is a sine wave, and the period of the...

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Abstract

The invention discloses a precise loading piezoelectric linear motor and a driving method thereof, which can solve the problem that the current piezoelectric actuators are difficult to realize a largestroke and high-precision motion due to constraints such as the size, the weight, and the motion pair clearance. The piezoelectric actuator is composed of a base, a guide rail assembly, mounting screws I, a stator assembly, mounting screws II, a guiding mechanism, a baffle plate, fixing screws I, a thread pair and locking screws. The invention adopts the oblique force generated by a double ceramic folding beam flexible hinge and the exciting method for the piezoelectric actuator to comprehensively control the friction force, and has the characteristics of compact structure, convenient assembly, high positioning precision and large stroke, and can be widely used in the technical field of micro-nano precision drive and positioning such as precise optical instrument and semiconductor processing.

Description

Technical field [0001] The invention relates to a precision loading type piezoelectric linear motor and a driving method thereof, belonging to the technical field of piezoelectric precision driving. Background technique [0002] Piezoelectric drive technology is a new drive method that uses the inverse piezoelectric effect of piezoelectric materials to convert electrical energy into mechanical energy. Compared with traditional electromagnetic drive methods, it has low speed, large torque (thrust), high torque density, and flexible design. , Compact structure, high positioning accuracy, fast response speed, power-off self-locking and no electromagnetic interference, and the need to use bearings and lubrication, etc., in the fields of robot joint drive, precision instrumentation, ultra-precision machining, aerospace and life sciences Both have broad application prospects and are one of the hotspots in the field of precision special drive technology in recent years. [0003] Among th...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H02N2/04H02N2/06
CPCH02N2/04H02N2/06
Inventor 程廷海于洋高琪唐晚静
Owner CHANGCHUN UNIV OF TECH