Super-junction device and manufacturing method thereof
A technology of superjunction device and manufacturing method, which is applied in semiconductor/solid-state device manufacturing, semiconductor devices, electrical components, etc., and can solve problems such as poor softness factor
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[0118] The manufacturing method of the super junction device of the first embodiment of the present invention is used to manufacture such Figure 4 The superjunction device of the first embodiment of the present invention is shown as an example for description, such as Figure 8A to Figure 8H Shown is a schematic cross-sectional view of the device in each step of the method for manufacturing a superjunction device according to the first embodiment of the present invention; in the method for manufacturing a superjunction device according to an embodiment of the present invention, the middle area of the superjunction device is the charge flow area, namely zone 1, The terminal zone, namely zone 3, surrounds the periphery of the charge flow zone, and the transition zone, zone 2 is located between the charge flow zone and the terminal zone; the structure of the top view of the super junction device can also be referred to figure 1 Shown. The method of the first embodiment of the pre...
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