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Vibration, Creep and Hysteresis Cascade Compensation Method for Piezoelectric Cantilever

A compensation method and cantilever beam technology, applied in the field of compensation, can solve the problems affecting the repeatability and accuracy of microsystem positioning, the performance of piezoelectric materials, and the overshoot of micro-operations, etc., to achieve shortened stabilization time, high accuracy, and improved The effect of positioning accuracy

Active Publication Date: 2021-06-22
NANJING UNIV OF SCI & TECH
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Problems solved by technology

Piezoelectric materials are widely used in micropositioning and clamping systems due to their fast response time and high resolution, but like other active materials, the performance of piezoelectric materials is strongly affected by nonlinearities
Among them, hysteresis and creep affect the positioning repeatability and accuracy of the microsystem, and vibration seriously affects the overshoot in micromanipulation and causes damage to microdevices

Method used

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  • Vibration, Creep and Hysteresis Cascade Compensation Method for Piezoelectric Cantilever
  • Vibration, Creep and Hysteresis Cascade Compensation Method for Piezoelectric Cantilever
  • Vibration, Creep and Hysteresis Cascade Compensation Method for Piezoelectric Cantilever

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Embodiment Construction

[0030] Such as figure 1 Shown is the open-loop nonlinear compensation control flow chart of the piezoelectric cantilever beam. The present invention proposes a cascade compensation method for vibration, creep and hysteresis of the piezoelectric cantilever beam, so that the input signal passes through the vibration controller, The creep compensator and the hysteresis compensator are applied to the piezoelectric cantilever, so that the system can recognize and compensate the three phenomena of vibration, creep and hysteresis step by step and continuously.

[0031] The input signal first passes through the vibration controller to reduce the overshoot, weaken the damping phenomenon, output a signal with good attenuation, creep and hysteresis, and then pass through the creep compensator to eliminate creep, and the output has good attenuation, no creep but but For the signal with hysteresis, input the signal into the hysteresis compensator to compensate the hysteresis, output a sign...

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Abstract

The invention discloses a cascade compensation method for vibration, creep and hysteresis of a piezoelectric cantilever beam. Aiming at the precision problems in micro-operations limited by hysteresis, creep and other nonlinearities in microsystems and vibration, the feedforward Techniques to improve the overall performance of piezoelectric cantilevers used in micromanipulation tasks; identify creep using a dynamic linear model, separating the creep portion from the step response curve; determine linear static gains and creep models, using open-loop control To compensate the creep; on the basis of the zero-vibration input shaping technology, determine the gain of the damped oscillation system, considering the input pulse amplitude and the delay of its application time. The invention can reduce hysteresis non-linearity, reduce creep, greatly remove overshoot, and improve the convenience and stability of micro adjustment.

Description

technical field [0001] The invention relates to a compensation method, in particular to a vibration, creep and hysteresis cascade compensation method for piezoelectric cantilever beams. Background technique [0002] At present, intelligent and functional micro-miniature systems are more and more widely used. One of the main characteristics of these micro-operating systems is that they must have a high degree of accuracy during operation. Piezoelectric materials are widely used in micropositioning and clamping systems due to their fast response time and high resolution, but like other active materials, the performance of piezoelectric materials is strongly affected by nonlinearities. Among them, hysteresis and creep affect the positioning repeatability and accuracy of the microsystem, and vibration seriously affects the overshoot in micromanipulation and causes damage to microdevices. [0003] The prior art usually uses a feed-forward inverse model to compensate for hystere...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G05B13/04
CPCG05B13/042
Inventor 陈远晟董妍男应展烽张旭东颜建虎徐冰赵荪翀杨国文
Owner NANJING UNIV OF SCI & TECH
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