A dual ion beam metal coating automation equipment

Abstract

The invention relates to double-ion-beam metal coating automation equipment. A vacuum coating chamber is arranged at the top of an equipment rack; a main ion source is arranged in the middle of the left side wall of an inner cavity of the vacuum coating chamber; a target material sliding block and an auxiliary source sliding block are arranged at the top of the inner cavity of the vacuum coating chamber separately, the target material sliding block is always located on the left side of the auxiliary source sliding block, the target material sliding block and the auxiliary source sliding blockcan move back and forth along the same horizontal line, a target material is arranged on the target material sliding block, and an auxiliary ion source is fixedly installed at the bottom of the auxiliary source sliding block; cooling wrapping layers are arranged on the outer walls of the main ion source and the auxiliary ion source respectively. The double-ion-beam metal coating automation equipment has the advantages that through heat dissipation protection, the service life of the equipment can be prolonged, and the use effect of the equipment can be improved; besides, the equipment can adapt to coating with various forms and sizes through various adjustment modes.

Description

technical field [0001] The invention relates to the technical field of ion coating, in particular to a double ion beam metal coating automatic equipment. Background technique [0002] In the known technical field, ion beam sputtering coating technology provides new technology and new technology of thin film coating for scientific research and production, and it is a new technology for superalloy conductor thin film, magnetic thin film device, thin film integrated circuit, thin film sensor, optical thin film, metal The wide range of applications such as heterostructure thin film preparation and thin film preparation in material modification provide new technical means. With the continuous expansion and extension of the application field of ion beam coating technology, the requirements for ion beam sputtering deposition thin film equipment are getting higher and higher. However, at present, this type of equipment is still dominated by single-function ion beam sputtering coati...

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Problems solved by technology

[0005] The purpose of the present invention is to provide a kind of double ion beam metal coating automation equipment, to solve the problem that the main ion source, auxiliary ion source and deposition target installation position of the above-mentioned device are fixed, the ion incidence angle cannot be greatly adjusted, and no rotation work is given. Due to the specific installation method of the table, the device can only coat the entire surface of the workpiece with a small shape. When the shape of the workpiece is large, or the shape is not flat but irregular, the film layer is difficult to cover the entire surface, and it is easy to appear uniform film. At the same time, neither the main ion source nor the auxiliary ion source of the above-mentioned device has a specific cooling scheme, which cannot achieve a good cooling effect. Working at a high temperature for a long time will easily affect the device and reduce the use of the device. The problem of longevity

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