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Flexible three-dimensional contact force sensor

A sensor and contact force technology, applied in the field of sensors, can solve the problems of low detection accuracy, high cost, complex structure, etc., and achieve the effects of high measurement accuracy, good linearity, and excellent performance

Inactive Publication Date: 2018-10-02
UNIV OF ELECTRONIC SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

At present, flexible multi-dimensional force sensors are mostly obtained on flexible metal materials, silicon-based materials or flexible fiber materials based on optical, electrical, magnetic and other phenomena, which have problems such as complex structure, high cost, and low detection accuracy.

Method used

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Embodiment

[0032] In a flexible three-dimensional contact force sensor provided in this embodiment, both the upper and lower packaging layers are made of PDMS with a thickness of 1mm; block; the three-dimensional contact force sensor includes 4 force sensing units arranged in an array, and each force sensing unit includes a lower electrode layer, a force sensitive film and an upper electrode layer arranged in sequence from bottom to top, wherein the force sensitive film Use conductive silver glue to bond the upper and lower electrode layers; the upper electrode layer and the lower electrode layer use printed silver electrodes, both with a thickness of 13 μm; the force-sensitive film includes polyimide powder and conductive carbon black with a mass ratio of 1:0.04, with a thickness of The specific preparation method is as follows: first, add polyimide into DMAC solvent, stir and mix evenly to obtain mixed solution A, the mass ratio of polyimide and DMAC in mixed solution A is 1:15; then, a...

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Abstract

A flexible three-dimensional contact force sensor belongs to the technical field of sensors. The flexible three-dimensional contact force sensor comprises a lower packaging layer, 4n force sensing units arranged in an array, an upper packaging layer and a force loading layer, wherein each force sensing unit comprises three layers of structures including a force sensitive thin film, an upper electrode layer arranged on the upper surface of the force sensitive thin film and a lower electrode layer arranged on the lower surface of the force sensitive thin film, and the n >= 1 and is a positive integer; and the upper electrode and the lower electrode of each force sensing unit are connected with an external acquisition system by means of lead wires respectively, and the force bearing situationof the sensor can be obtained through detecting resistance changes of the force sensitive thin film in each force sensing unit. Compared with the conventional sensor, the flexible three-dimensional contact force sensor provided by the invention has wider measurement range in the shear force direction and high measurement precision on the premise of satisfying flexibility and small size, and can be applied to intelligent machine power detection equipment such as robot fingertip, medical endpoint force detection and human-computer interaction as well as other equipment that needs to detect multi-dimensional forces.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to a flexible three-dimensional contact force sensor. Background technique [0002] With the development of science and technology and the improvement of application requirements, higher requirements are put forward for the flexibility, miniaturization and intelligence of sensors. Among them, the flexible multi-dimensional force sensor can measure forces in more than two directions at the same time, and can be twisted and stretched at will. It has great application prospects in industrial manufacturing, medical testing, home intelligence, wearable devices and other fields. [0003] As an important part of future intelligent robots, flexible multi-dimensional force sensors are necessary media for the exchange of force and tactile information between intelligent robots and the external environment. The development of three-dimensional force sensors that meet the requirements of practi...

Claims

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Application Information

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IPC IPC(8): G01L1/22G01L5/16
CPCG01L1/22G01L5/161
Inventor 蒋书文术洋溢肖瑶于江涛孙雷张万里
Owner UNIV OF ELECTRONIC SCI & TECH OF CHINA
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