A flexible pyroelectric infrared detector sensitive unit for low-voltage electrical interference
A pyroelectric infrared and sensitive unit technology, which is applied to pyroelectric devices, electrical radiation detectors, instruments, etc. with thermal changes in dielectric constant, which can solve the problem of inability to eliminate piezoelectric signal interference, reduced detector array resolution, and effective sensitivity. Reduce the number of units and other issues, to achieve the effect of eliminating the interference of external vibration and environmental temperature fluctuations, improving resolution, good symmetry and stability
Active Publication Date: 2020-08-21
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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Problems solved by technology
[0007] The object of the present invention is to provide a flexible pyroelectric infrared detector sensitive unit for low-voltage electrical interference, which solves the environmental interference that the existing pyroelectric infrared detector adopts the structure that the sensitive elements are arranged side by side to make the sensitive element feel Therefore, the piezoelectric signal interference cannot be eliminated, and the number of effective sensitive units is reduced, resulting in a decrease in the resolution of the detector array.
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Embodiment 1
[0053] The manufacturing method of the flexible pyroelectric infrared detector sensitive unit of the low-voltage electric interference comprises the following steps:
[0054] Step 1: Dissolve the flexible pyroelectric polymer completely into a solution, and then evenly cover the solution on the flat substrate, and then bake it in a constant temperature box until the solvent is completely volatilized, and the flexible pyroelectric polymer forms a sensitive film, and then Peel off the sensitive film to obtain a 20mm×20mm flexible pyroelectric polymer film;
[0055] Step 2: Prepare metal electrode layers of the same thickness on the upper and lower surfaces of the 20mm×20mm flexible pyroelectric polymer film by evaporation and sputtering to form upper and lower electrode layers;
[0056] Step 3: Prepare a cross-sectional area of 1mm with silicon material 2 , a heat-insulating spacer column with a height of 100 μm, a support column with the same cross-sectional area and height ...
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Abstract
The invention discloses a flexible pyroelectric infrared detector sensitive unit for low-voltage electrical interference, which relates to the field of pyroelectric sensor structure design, comprising an upper flexible pyroelectric polymer film on the upper layer and a lower flexible pyroelectric polymer film on the lower layer A polymer film, the upper surface of the upper flexible pyroelectric polymer film is provided with a first electrode layer, the lower surface is provided with a second electrode layer, and the upper surface of the lower flexible pyroelectric polymer film is provided with a third electrode layer 1. The lower surface is provided with a fourth electrode layer, and an adiabatic spacer column is connected between the second electrode layer and the third electrode layer; The environmental interference felt by the sensitive elements is different, so the piezoelectric signal interference cannot be eliminated, and the number of effective sensitive elements is reduced, resulting in a decrease in the resolution of the detector array.
Description
technical field [0001] The invention relates to the field of structural design of pyroelectric sensors, in particular to a sensitive unit of a flexible pyroelectric infrared detector for low-voltage electrical interference. Background technique [0002] Pyroelectric infrared detector is a heat-sensitive infrared detector made of the effect that the spontaneous polarization of pyroelectric materials changes with temperature. Traditional pyroelectric infrared detectors use rigid ferroelectric ceramics or Ferroelectric crystals, the existing flexible pyroelectric infrared detectors based on ferroelectric polymers have the advantages of light weight, flexibility, impact resistance, corrosion resistance, and easy processing, and have great potential in fields that require high device portability. Good application prospects. [0003] However, due to the piezoelectric effect of the ferroelectric polymer itself, the detector is extremely susceptible to interference from external vi...
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IPC IPC(8): G01J5/02G01J5/10H01L37/02
CPCG01J5/02G01J5/10H10N15/10
Inventor 黎威志高若尧张天杜晓松太惠玲于贺
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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