Langmuir probe, Langmuir probe diagnosis system and diagnosis method thereof
A technology of Langmuir probe and diagnostic method, applied in electrical components, plasma, etc., can solve problems such as reducing measurement accuracy
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[0049] According to one aspect of the present invention, there is provided a Langmuir probe, such as figure 1 as well as figure 2 As shown, it includes a collector 101, a conductive screw lead 102, a ceramic sheath 103 and a nut 104; the collector 101 includes a cylindrical first sub-collector 1011 and a cylindrical second sub-collector 1012;
[0050] The diameter of the first sub-collector 1011 is greater than the diameter of the second sub-collector 1012, and the first sub-collector 1011 and the second sub-collector 1012 are concentric structures, and the first sub-collector 1011 and the second sub-collector 1012 are integrated forming;
[0051] The conductive screw leads 102 are screwed into the second sub-collector 1012 to connect with the second sub-collector 1012, and the ceramic sheath 103 is in the shape of a boss, and is sleeved on the side of the first sub-collector 1011 and the second sub-collector 1012 and interference fit with the first sub-collector 1011 and t...
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