Shadow mask for OLED evaporation, manufacturing method of shadow mask, and manufacturing method of OLED panel

Abstract

The invention provides a shadow mask for OLED evaporation, a manufacturing method of the shadow mask, and a manufacturing method of an OLED panel. The manufacturing method of the shadow mask includesthe steps of providing a semiconductor substrate which includes a front surface and an opposing back surface; forming a grid film layer covering the front surface of the semiconductor substrate; etching the grid film layer to form a plurality of openings which are arranged in an array in the grid film layer and expose the front surface of the semiconductor substrate; and etching the semiconductorsubstrate along the back surface of the semiconductor substrate to form a groove which exposes the openings in the grid film layer and the grid film layer between the adjacent openings in the semiconductor substrate. The size of the openings in the grid film layer of the shadow mask formed by the method can be small and the shape is good, a light-emitting unit which is small in size and good in shape can be formed when the shadow mask is used for evaporation, the influence of the shadow effect can be reduced, and the opening rate can be increased.

Description

technical field [0001] The invention relates to the field of OLED evaporation, in particular to a high-precision shadow mask for OLED evaporation, a manufacturing method thereof, and a manufacturing method of an OLED panel. Background technique [0002] Organic light-emitting diode (Organic Light-Emitting Diode, OLED) display panel also has self-illumination (no backlight required), high contrast, thin thickness, wide viewing angle, fast response, can be used for flexible panels, and has a wide temperature range Guanghe's structure and manufacturing process are relatively simple, and it is more and more favored by the industry. [0003] The original color scheme of the OLED display panel is to make a display unit that displays white light, and then use the corresponding color filter together. This technical solution This technical solution requires the introduction of color filters. Due to the blocking of color filters, about 80% of the light output from the display sub-pix...

AI Technical Summary

Problems solved by technology

[0006] However, the existing OLED panel formed by evaporation has the problem that the limit size of the sub-pixel (light-emitting unit) is still increased, the aperture ratio is still low, and the problem that it cannot meet the requirements of a small-sized high-resolution OLED panel

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