Preparation method of micrometer LED linear light-emitting body
A technology of linear body and light-emitting body, applied in semiconductor devices, gaseous chemical plating, coating and other directions, can solve the problems of low qualification rate, complicated preparation method, unable to assemble and prepare qualified rate, etc., and achieve the effect of low cost
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[0074] The invention relates to a preparation method of a micron LED epitaxy vertical columnar reaction cavity and a linear illuminant, especially a preparation process for the formation of micro-LED composition luminescent grains, specifically, the linear illuminant utilizes an upright cylindrical Reaction chamber, so as to achieve epitaxy, evaporation, etching and other processes of linear luminous body in the upright cylindrical reaction chamber, and then the obtained epitaxy can still be assembled in the case of extremely small volume, and can The effect of improving its pass rate.
[0075] The above-mentioned linear crystallization baselines are arranged in the upper end of the vertical cylindrical reaction chamber in a hanging manner, and then the first layer of the required multi-layer film is coated on the surface of the linear crystallization baselines by spraying the gas inlet at the upper end. And the second layer, and then achieve the effect of 360-degree circumfer...
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