Overflow protection device for polysilicon water-cooled ingot furnace

Abstract

An overflow protection device for a polysilicon water-cooled ingot furnace is provided. The whole device comprises a thermal resistance wire and a water cooling device which are arranged in a furnaceshell, wherein the thermal resistance wire is located below the water cooling device; the thermal resistance wire is electrically connected with a control device, a resistance converter is arranged inthe control device, and the resistance converter is electrically connected with the thermal resistance wire and used for detecting the on-off state of the thermal resistance wire; the input end of the water cooling device is connected with one end of a first main pipe, the other end of the first main pipe is connected with a water pipe and a gas pipe, a first valve is arranged on the water pipe,a second valve is arranged on the gas pipe, and the control device is electrically connected with the first valve and the second valve; and a second main pipe is connected with the output end of the water cooling device. When overflow occurs, the device quickly replaces the cooling water of a water cooling system with airflow through a gas and water exchange device, thereby isolating the contact between the high-temperature silicon liquid and the cooling water, and reducing the risk of burst of the furnace shell due to the overflow.

Description

technical field [0001] The invention belongs to the field of polysilicon water-cooled ingot casting, in particular to an overflow protection device for a polysilicon water-cooled ingot casting furnace. Background technique [0002] With the development of ingot casting technology, there are countless types of ingot casting furnaces. Water-cooled ingot casting furnaces are more and more valued by the current semi-melting process due to their unique cooling source mode, stable thermal field environment and uniform temperature gradient. , but a major safety hazard of the water-cooled ingot casting furnace is that when overflow occurs, the high-temperature silicon liquid is likely to come into contact with the cooling water in the water-cooling system, causing the water flow to gasify when heated, resulting in a surge in furnace pressure and the risk of furnace shell bursting . [0003] At present, most of the overflow protection measures for polysilicon water-cooled ingot cast...

AI Technical Summary

Problems solved by technology

Among the existing protective measures, the package of high-temperature carbon felt or high-temperature cotton cannot completely isolate the contact between the high-temperature silicon liquid and the water flow in the water cooling system. When the protective measures of the package are destroyed by the silicon liquid, the water flow of the water cooling system will be in contact with the high temperature Direct contact with the silicon liquid, the water flow is heated and gasified, resulting in a surge in furnace pressure, which in turn causes the furnace shell to burst

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