Electret transistor force sensor and preparation method thereof

A technology of force sensor and electret, which is applied in the field of sensing, can solve the problems that the monitoring of static or quasi-static pressure and deformation is difficult to realize, and achieve the effect of high sensitivity and simple preparation method
CN108931323AInactive Publication Date: 2018-12-04FUDAN UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
FUDAN UNIV
Publication Date
2018-12-04
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention belongs to the field of sensing technology, and to an electret transistor force sensor with a dynamic and static force monitoring function and a preparation method thereof. The electrettransistor force sensor is composed of an electret material and a semiconductor material. The electret deforms on the condition of an external force function, thereby causing a polarization state change, and furthermore causing change of source leakage current. Through detecting the source leakage current, monitoring to a static force and a dynamic force is realized. The electret transistor forcesensor and the preparation method thereof settle a problem of high difficulty in performing (quasi)static force monitoring on an electret capacitor. The electret transistor force sensor and the preparation method have advantages of simple preparation method, high sensitivity and high suitability for application in various fields with a force monitoring / detecting requirement.
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Description

technical field

[0001] The invention belongs to the field of sensing technology, and in particular relates to an electret transistor force sensor and a preparation method thereof. Background technique

[0002] Electrets refer to materials that can store space charges or dipole charges for a long time. According to the type of charge carried by the electret, it can be divided into intrinsic electret and artificial electret. The local net charge of the former is the polarization charge formed by the orientation of the polar unit of the material itself in the electric field; while the charge of the latter is It is generated under the action of external field excitation or injected from the outside. In a broad sense, electrets include various intrinsic and artificial piezoelectric materials.

[0003] Electret has piezoelectric properties and can generate electrical signals under the action of external force, so it is widely used in the preparation of various force sensors. Ho...

Claims

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