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Recovery process and cold hydrogenation process of silicon-containing high boilers in polysilicon cold hydrogenation process

A process method and high boiler technology, which are applied to the recovery process method of silicon-containing high boilers and the field of cold hydrogenation process, can solve problems such as waste, and achieve the effects of avoiding waste, reducing costs, and reducing slag discharge.

Active Publication Date: 2020-05-12
新疆新特晶体硅高科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this treatment method is not only a huge waste of Si and Cl elements, but also requires a large amount of alkali to neutralize the hydrogen chloride released by the hydrolysis reaction.

Method used

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  • Recovery process and cold hydrogenation process of silicon-containing high boilers in polysilicon cold hydrogenation process
  • Recovery process and cold hydrogenation process of silicon-containing high boilers in polysilicon cold hydrogenation process

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0034] This embodiment provides a method for recovering silicon-containing high boilers in the polysilicon cold hydrogenation process, using figure 1 device, including the following steps:

[0035] (1) Silicon tetrachloride, hydrogen, and silicon are added into the cold hydrogenation reactor 1 and the cold hydrogenation reaction occurs. The first light component obtained at the top 11 of the cold hydrogenation reactor is passed into the washing tower 2, wherein , the first light component includes the generated trichlorosilane, silicon-containing high boilers, unreacted silicon tetrachloride and hydrogen, which are washed with chlorosilane in the washing tower 2, and the washing process can remove most of the Silicon-containing high boilers, silicon, and metal chlorides are deposited in the bottom liquid of the washing tower 2, and the second light component is obtained at the top 21 of the washing tower, and the mixture is obtained at the bottom 22 of the washing tower. Incl...

Embodiment 2

[0042] This embodiment provides a method for recovering silicon-containing high boilers in the polysilicon cold hydrogenation process, using figure 1 device, including the following steps:

[0043] (1) 50t / h silicon tetrachloride, 23000Nm 3 The hydrogen per hour is passed through the pipeline from the tower kettle 12 of the cold hydrogenation reactor, and the silicon powder is passed into the middle and upper part of the cold hydrogenation reactor 1, and the cold hydrogenation reaction occurs in the cold hydrogenation reactor 1, and the reaction temperature is controlled at 500 ℃, the pressure is controlled at 1.8MPa, the reaction produces trichlorosilane and a small amount of by-product silicon-containing high boilers, and the top 11 of the cold hydrogenation reactor obtains the first light component, which includes the generated trichlorosilane Hydrogen silicon, silicon-containing high boilers, unreacted silicon tetrachloride and hydrogen. After the first light component o...

Embodiment 3

[0053] This embodiment provides a method for recovering silicon-containing high boilers in the polysilicon cold hydrogenation process, using figure 1 The device in the present embodiment and the difference of the recovery process method of the silicon-containing high boiler in embodiment 2 are:

[0054] The temperature of the cold hydrogenation reaction in step (1) in this embodiment is 450° C., the pressure is 1.5 MPa, and the temperature in the washing tower 2 and the temperature of the bottom liquid in the bottom of the washing tower 2 are maintained at 170° C.

[0055] The temperature in step (2) stripper 5 is maintained on 110 ℃, and the flow of the hydrogenchloride that feeds in stripper 5 is 600Nm 3 / h, the catalyst is N,N-dimethylaniline, and the amount of the catalyst passed into the stripping tower is 1wt% of the amount of the mixture passed into the stripping tower. The slagging method of the slag slurry obtained in the tower kettle 52 of the stripping tower is con...

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Abstract

The invention discloses a process for recovering a silicon-containing high-boiling substance in a polysilicon cold-hydrogenation process and the cold hydrogenation process thereof. The process comprises the steps: silicon tetrachloride, hydrogen, and silicon are subjected to a cold hydrogenating reaction in a cold hydrogenation reactor to obtain a first light component at the top of the cold hydrogenation reactor, and the first light component is introduced into a rinsing tower, leaching is carried out with chlorosilane in the rinsing tower, a second light component is obtained at the top of the rinsing tower, a mixture obtained at the bottom of the rinsing tower is introduced into a stripper, hydrogen or chlorosilane is introduced into the stripper for stripping, and then hydrogen chloride and a catalyst are introduced, and the silicon-containing high-boiling substance and hydrogen chloride are catalytically cracked under the catalyst, a third light component is obtained at the top ofthe stripper, and slag slurry is obtained at the bottom of the stripper. On-line continuous recovery of the high-boiling substance during cold hydrogenation without the addition of a special crackingcolumn is realized, stripping is carried out in the stripper, the catalytic cracking reaction is carried out, and the stripper is also equivalent to the action of the cracking column.

Description

technical field [0001] The invention belongs to the technical field of polysilicon production, and in particular relates to a recovery process method and a cold hydrogenation process for silicon-containing high boilers in a polysilicon cold hydrogenation process. Background technique [0002] Regardless of whether the polysilicon production adopts the improved Siemens method or the silane thermal decomposition method, a large amount of silicon tetrachloride produced needs to be recycled. Silicon tetrachloride, silicon powder, and hydrogen undergo the following cold hydrogenation reaction: 3SiCl 4 +2H 2 +Si→4SiHCl 3 , the generation of trichlorosilane can make the production of polysilicon form a closed loop, thereby greatly reducing the production cost of polysilicon. However, in the actual cold hydrogenation process, in addition to the generation of trichlorosilane, there will also be Si 2 Cl 6 、Si 2 HCl 5 、Si 2 h 2 Cl 4 、Si 3 Cl 8 、Si 3 Cl 8 A series of by-pr...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C01B33/107
CPCC01B33/1071C01B33/10747C01B33/10757
Inventor 夏高强刘兴平刘建海潘姝言范协诚银波宋高杰周迎春
Owner 新疆新特晶体硅高科技有限公司