Resonant-type double-shaft micro mechanical wheel-type gyro

Abstract

The invention relates to a resonant-type double-shaft micro mechanical wheel-type gyro. The tesonant-type double-shaft micro mechanical wheel-type gyro comprises a substrate, an anchor point, a centershaft, a driving folded beam, an internal ring framework, an external ring framework, a detection X shaft torsion beam, a detection Y shaft torsion beam, a detection quality block, a detection capacitor, a driving comb capacitor, and a driving feedback comb capacitor; the internal ring framework is connected with the center shaft through the driving folded beam; the internal ring framework is connected with the external ring framework through the detection X shaft torsion beam; the external ring framework is connected with the detection quality block through the detection Y shaft torsion beam; the internal side and the external side of the internal ring framework are connected with a movable electrode of the driving feedback comb capacitor and a movable electrode of the driving comb capacitor respectively; fixed electrodes of the driving feedback comb capacitor and the driving comb capacitor are connected with the substrate; a movable electrode of the detection capacitor is connectedwith the detection quality block, and a fixed electrode is connected with the substrate. The technology process is simple; single mass block double gyro production can be realized; and large batch production can be realized.

Description

technical field [0001] The invention relates to a micromechanical gyroscope, in particular to a resonant double-axis micromechanical wheel gyroscope. Background technique [0002] A gyroscope is a device used to detect the angular velocity of an object in motion. Micromechanical gyroscopes have the advantages of small size, light weight, low cost, low power consumption, and easy integration. They have been widely used in aviation, aerospace, weapons, automobiles, and consumer electronics. An inertial measurement unit (IMU) is a unit composed of a single-axis, two-axis or three-axis gyroscope or an accelerometer, which can simultaneously measure the acceleration and angular velocity of multiple axes of an object. After a series of data processing, the object's Speed, displacement, direction, attitude and other information. [0003] At present, the single proof-mass gyroscope is the most widely studied and relatively mature form of micro-electromechanical vibrating gyroscope...

AI Technical Summary

Problems solved by technology

However, because multiple components are integrated together, the volume is large, and the coupling between different devices will affect the performance of the device. At the same time, the assembly of multiple components requires high process compatibility.

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