High-transmittance atomic beam microscopic apparatus

Abstract

The invention relates to the technical field of microscopy of materials and provides a high-transmittance atomic beam microscopic apparatus including a gas tank, a gas pipe, a vacuum chamber formed byconnecting a first chamber and a second chamber, a jet head, a splitter, a gas transmittance window slice, an atom diffraction slice, through holes in a first-stage Fresnel zone plate transmission area, through holes in a second-stage Fresnel zone plate transmission area, a first detector, a sample, a sample table, a computer, a second detector, a first gas suction port, a first vacuum pump set,a second gas suction port and a second vacuum pump set. The first detector and the second detector respectively detect the atoms that are reflected by the surface of the sample and work under a differential pair mode. The atom diffraction slice with through holes is easy to manufacture, wherein the through holes are orderly arranged according to corresponding Fresnel zones, so that the total areaof through holes in the cross section are of a certain atomic beam flow can be increased, and the transmittance of the atomic beam flow is increased. The apparatus can form a sharp focusing beam spotand inhibit higher-order diffraction, thereby increasing the signal-to-noise ratio of the apparatus.

Description

technical field [0001] The invention relates to the field of microscopic technology for materials, in particular to a high-transmittance atomic beam microscopic device with a specially designed atomic diffraction sheet. Background technique [0002] In the field of microscopic technology, the existing electron microscope can only image conductive samples, and the electron beam emitted by the electron microscope is of high energy, which will cause some sensitive sample surfaces to be damaged by radiation. The atomic beam microscope can overcome the above defects and image fragile or insulating samples. It usually uses inert gas atoms as the emitting atoms. The energy of the atomic beam of the inert gas is very low and its chemical properties are very stable. Obtain an image of the surface of the sample. The working principle of the atomic beam microscope is: in a high vacuum, the free atomic flow passes through the nozzle and the aperture to form a beam of gas atoms and shoo...

AI Technical Summary

Problems solved by technology

[0003] The defect of the existing technology is that in a working mode of the atomic beam microscope, the Fresnel zone plate is used to focus the atoms in the form of de Broglie matter waves, and the ultimate resolution is determined by the outermost part of the Fresnel zone. Due to the low energy of the atomic beam, the atoms will not penetrate the solid material, so the ring used to transmit the atoms on the Fresnel zone plate must adopt an unsupported structure, which is relatively difficult in processing. In addition, the through-holes of some atomic diffraction sheets with a through-hole structure are randomly distributed, and the disadvantage is that the number of through-holes on a certain cross-sectional area of ​​the atomic beam is limited, the atomic transmittance is limited, and the atomic beam The focusing effect is not good enough, and the beam spot will be interfered by high-order diffraction. The high-transmittance atomic beam microscopic device can solve the problem

Images