An igbt with robust short-circuit withstand capability
A powerful, robust technology applied to IGBTs. field, it can solve the problems such as the decrease of device short-circuit turn-off capability and the decrease of short-circuit withstand capacity, and achieve the effects of improving short-circuit withstand capacity, reducing short-circuit current, and reducing conduction voltage
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[0037] An IGBT with robust short-circuit withstand capability, such as figure 2 As shown, its cellular structure includes metal collector 7, P+ collector region 6, N-type buffer layer 5, N-drift region 4 and metal emitter 11 stacked sequentially from bottom to top; the N-drift region 4 The middle area of the top layer is provided with a discrete P+ floating pbody area 8, the two sides of the discrete P+ floating pbody area 8 are respectively provided with a P+ base area 2, and the top layer of the P+ base area 2 is provided with an N+ emission area 1; The P+ base region 2 and the N+ emitter region 1 are in contact with the discrete P+ floating pbody region 8 through the metal emitter 11; a gate is provided between the P+ base region 2 and the N+ emitter region 1 and the discrete P+ floating pbody region 8 structure, the gate structure includes a gate electrode 9 and a gate dielectric layer 3, the gate dielectric layer 3 extends into the N-drift region 4 along the vertical d...
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