light modulator
An optical modulator and optical waveguide technology, applied in instruments, optics, nonlinear optics, etc., can solve the problems of complex electrode structure and complex circuit structure of the driving system, etc.
Active Publication Date: 2021-10-22
TDK CORPARATION
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Problems solved by technology
High-speed optical modulators of 40Gb / s or higher are commercialized, but there is a big disadvantage that the total length is about 10cm
However, since this optical modulator 400 is a dual-drive type having two signal electrodes 24a, 24b, there are problems such as complicated electrode structures.
In addition, since two input connectors for high-frequency electrical signals are required, and the phase of the electrical signal whose data is reversed needs to be applied to the two signal electrodes, there are disadvantages such as complicated circuit structure of the drive system.
Method used
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[0090] The wavelength chirp α of the modulated light of the optical modulator when the thickness T of the lower layer portion 8b of the first ground electrode 8 (the thickness of the insulating layer 5 ) T is a variable parameter was obtained by simulation. Here, the thickness of the waveguide layer 2 made of lithium niobate film including the ridge 2r (the total thickness of the waveguide layer 2 and the protective layer 3) is 1.5 μm, and the ridge width (W 0 ) is 1 μm, the thickness of the buffer layer 4 is 0.9 μm, and the dielectric constant of the buffer layer 4 is 13. In addition, the material of the electrode layer 6 on which the signal electrode 7 and the first and second ground electrodes 8 and 9 are formed is set to Au, and its maximum thickness is set to 11 μm. In addition, the width W of the upper layer portion 7a of the signal electrode 7 10 and the width W of the lower part 7b 11 Both were set to 3 μm.
[0091] In addition, the thickness of the lower layer port...
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Abstract
The present invention provides a single-drive optical modulator with excellent high-frequency characteristics and reduced wavelength chirp of modulated light. The optical modulator (100) has: a Mach-Zehnder optical waveguide (10) including the first and second optical waveguides (10a, 10b), a buffer layer (4) covering the first and second optical waveguides (10a, 10b) ), and an electrode layer (6), the electrode layer (6) has: the first and second ground electrodes (8, 9), and the first and second ground electrodes (8, 9) between the first and second ground electrodes (8, 9) in plan view The signal electrode (7); the signal electrode (7) has: the first lower surface (S) covering the first optical waveguide (10a) via the buffer layer (4) 11 ); the first ground electrode (8) has: the first lower surface (S) covering the second optical waveguide (10b) via the buffer layer (4) 21 ) and located on the first lower surface (S 21 ) above the second lower surface (S 22 ); the interval between the signal electrode (7) and the second ground electrode (9) (G 3 ) is greater than the interval between the signal electrode (7) and the first ground electrode (8) (G 2 ).
Description
technical field [0001] The invention relates to an optical modulator used in the fields of optical communication and optical measurement, in particular to an electrode structure of a Mach-Zehnder type optical modulator. Background technique [0002] With the popularity of the Internet, the communication volume has increased dramatically, and the importance of optical fiber communication is very high. Optical fiber communication is a communication method that converts electrical signals into optical signals and transmits optical signals through optical fibers. It has the characteristics of wide bandwidth, low loss, and strong noise resistance. [0003] As a method of converting an electrical signal into an optical signal, a direct modulation method using a semiconductor laser and an external modulation method using an optical modulator are known. Although direct modulation does not require an optical modulator and is low in cost, it has limitations in high-speed modulation, ...
Claims
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IPC IPC(8): G02F1/035
CPCG02F1/035G02F1/225G02F2202/20G02F1/212
Inventor 岩塚信治佐佐木权治
Owner TDK CORPARATION