A preparation method of a multifunctional thermoelectric thin film power generation and light intensity sensor device

A technology of light intensity sensor and thermoelectric thin film, applied in the manufacture/processing of thermoelectric devices, thermoelectric devices that only use Peltier or Seebeck effect, etc., can solve the problems of little visible light detection, existence of noise, high absorption rate, etc., and achieve high reliability Performance, power generation efficiency and output voltage improvement, high sensitivity effect

Active Publication Date: 2018-12-25
BEIHANG UNIV
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Problems solved by technology

The light sensor devices prepared according to the photon effect only have high sensitivity to part of the wavelength range, and there is always noise; the light sensor devices based on the photothermal effect have no sele

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  • A preparation method of a multifunctional thermoelectric thin film power generation and light intensity sensor device
  • A preparation method of a multifunctional thermoelectric thin film power generation and light intensity sensor device
  • A preparation method of a multifunctional thermoelectric thin film power generation and light intensity sensor device

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Embodiment Construction

[0042] The present invention will be further described in detail with reference to the accompanying drawings and embodiments.

[0043]The invention provides a design and preparation method of a multi-functional high-density thermoelectric thin film power generation and light intensity sensor device, which utilizes the carrier transport inside the solid thermoelectric material to realize mutual conversion of heat energy and electric energy, and is compatible with development by designing high-density thermoelectric thin film devices. The method of permanent micromachining preparation greatly improves the power output, light intensity response and reliability of the device, so as to carry out environmental heat energy collection and active light intensity sensing, and realize the dual functions of thermoelectric power generation and signal sensing. The prepared thermoelectric Thin film power generation and light intensity sensor devices have high output voltage, high responsivity...

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Abstract

The invention discloses a preparation method of a multifunctional thermoelectric thin film power generation and light intensity sensor device, belonging to the technical field of energy collection andsensing of a miniature thin film functional device. The method comprises the steps of: pretreating a substrate; depositing patterned high-density N-type thermoelectric thin films on the pretreated substrate; annealing the N-type thermoelectric film; depositing a patterned high-density P-type thermoelectric thin film and an electrode thin film on the pretreated substrate, wherein the electrode thin film serially connects a thermocouple formed by the pattern of the P-type thermoelectric thin film and the N-type thermoelectric thin film; forming a thermoelectric device by pasting a heat-absorbing film on the hot end of the thermocouple; and assembling the thermoelectric device with the Fresnel lens, the heat dissipation structure and the housing to form the multifunctional thermoelectric thin film power generation and light intensity sensor device. The invention can realize power generation and light intensity sensing, and the thermoelectric thin film device prepared by the method of theinvention has the characteristics of high output voltage, high responsiveness and the like through the light intensity sensing test.

Description

technical field [0001] The invention belongs to the technical field of energy collection and sensing of micro-thin-film functional devices, and specifically relates to a multifunctional high-density thermoelectric thin-film power generation device with high output voltage, high responsivity, high sensitivity, high accuracy, high reliability and wide response range. The preparation method of the light intensity sensor device. Background technique [0002] As all solid-state devices, thermoelectric devices contain no moving parts, thus reducing physical and electrical failures, and are also noise-free during long-term stand-alone operation for high reliability. Thermoelectric devices based on the Seebeck effect have been used in power generation, temperature measurement, and infrared detection. However, with the development of low power consumption and wireless electronic devices, as well as the continuous updating of components such as sensors and micro-electromechanical sys...

Claims

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Application Information

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IPC IPC(8): H01L35/34H01L35/32
CPCH10N10/01H10N10/17
Inventor 祝薇郭占鹏邓元
Owner BEIHANG UNIV
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