Yttrium hydroxide photochromic and thermochromic multilayer film material capable of achieving fast fading
A multi-layer thin film and yttrium hydride technology, which is applied in metal material coating process, coating, vacuum evaporation plating, etc., can solve the problems of low solar energy regulation rate, poor weather resistance, low decolorization rate, etc., and achieve the film-making step Simple, inexpensive, low energy consumption effect
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[0048] Preparation of Dimming Layer Containing Yttrium Oxyhydride. Wherein, the target material of the dimming layer containing yttrium oxyhydride may be metal yttrium or yttrium hydride. Using DC magnetron sputtering technology or AC magnetron sputtering technology to prepare the oxygen-containing yttrium hydride dimming layer on the surface of the FTO electric heating layer.
[0049] In one embodiment of the present invention, using metal yttrium as the target material, the parameters for preparing the dimmer layer containing yttrium oxyhydride by DC magnetron sputtering technology include: background vacuum-5 Pa, mixed atmosphere of argon and hydrogen, substrate temperature 25°C-300°C, substrate speed 5-15 rpm, sputtering power 30-100W, sputtering time 10-100min, working pressure 0.3Pa-2Pa. Wherein, the flow rate of the argon gas may be 20-50 sccm, and the flow rate of the hydrogen gas may be 5-20 sccm. Further, the volume ratio of argon and hydrogen may be (1-25):1, prefe...
Embodiment 1
[0061] Example 1 Preparation of photothermochromic multilayer film containing yttrium oxyhydride
[0062] 1) Cleaning of the substrate:
[0063] Put the FTO substrate (manufacturer: Kaivo; model: FTO-003) in a beaker, ultrasonically treat it in deionized water, ethanol, and deionized water for 10 minutes, and then use pH test paper to confirm that the final washing solution is neutral;
[0064] 2) Preparation of photothermochromic multilayer films
[0065] Method 1: The magnetron sputtering system adopts the DC current magnetron sputtering method. The vacuum system is composed of a molecular pump and a mechanical pump. The background vacuum degree of the vacuum chamber reaches 10 -5 Magnitude. The target components are 2-inch pure yttrium metal, 2-inch pure tungsten metal, and 2-inch silicon targets. After the background vacuum reaches the requirement, put the cleaned substrate into the deposition chamber, and then fill the vacuum chamber with high-purity Ar gas and H 2 Ai...
Embodiment 2
[0082] 1) Clean and clean the FTO electric heating layer substrate, the thickness is 400nm;
[0083] 2) Preparation of photothermochromic multilayer films;
[0084] Method 1: The magnetron sputtering system adopts the DC current magnetron sputtering method. The vacuum system is composed of a molecular pump and a mechanical pump. The background vacuum degree of the vacuum chamber reaches 10 -5 Magnitude. The target components were 2 inches of pure yttrium metal and 2 inches of pure tungsten metal. After the background vacuum reaches the requirement, put the cleaned substrate into the deposition chamber, and then fill the vacuum chamber with high-purity Ar gas and H 2 Gas, ratio (3:1), flow rate (35:12). Control the substrate rotation speed to 5r / min. Wait until the pressure of the deposition chamber is stabilized at 0.4-2Pa;
[0085] a) Depositing a Y target material by sputtering, the sputtering parameters are: W(Y)=60W, t(Y)=3000s, to obtain a dimming layer containing yt...
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