Ultra-precise displacement measuring system based on optical neural network

A technology of neural network and displacement measurement, which is applied in the field of ultra-precision displacement measurement system based on optical neural network, can solve problems such as the influence of measurement accuracy, and achieve the effects of low environmental sensitivity, high resolution and precision, and high integration

Active Publication Date: 2019-01-15
TSINGHUA UNIV +1
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  • Summary
  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

However, due to the existence of the phase detection process, it is impossible to fundamentally eliminate the decline in accuracy and time delay, and before entering the phase detection device for processing, it is necessary to use a photodetector to convert the interference light signal into an electrical signal, and the performance of the photodetector will also be affected. The measurement accuracy will be affected

Method used

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  • Ultra-precise displacement measuring system based on optical neural network
  • Ultra-precise displacement measuring system based on optical neural network
  • Ultra-precise displacement measuring system based on optical neural network

Examples

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no. 1 example

[0034] image 3 Schematically shows the structure of the grating ruler displacement measurement system based on the optical neural network 3 of the present invention, that is, the structure of the measurement system when the optical displacement measuring device 2 is a grating ruler, including: a light source 1, an optical displacement measuring device 2, an optical nerve Network 3 , detector array 4 , and signal processing device 5 .

[0035] Such as image 3 As shown, in this embodiment, the light source 1 is an incoherent light source, the optical displacement measuring device 2 is a grating ruler, and the optical neural network 3 is a spatial light modulator 31 .

[0036] The working principle of this embodiment is exactly the same as the working principle of the present invention described above. The grating ruler mainly includes a scale grating 211 and an indicating grating 212. When the two gratings move relative to each other, the Moiré fringe light signal is output a...

no. 2 example

[0038] Figure 4a Schematically shows the structure of the optical interference displacement measurement system based on the optical neural network 3 of the present invention, that is, the structure of the measurement system when the optical displacement measurement device 2 is an optical interferometer, including: a light source 1, an optical displacement measurement device 2, An optical neural network 3 , a detector array 4 , and a signal processing device 5 .

[0039] Such as Figure 4a As shown, in this embodiment, the light source 1 is a single-frequency laser, the optical displacement measuring device 2 is a homodyne laser interferometer, and the optical neural network 3 is a passive optical neural network; wherein, the homodyne laser interferometer includes a first spectroscopic Prism 221 , reference mirror 223 , measurement mirror 222 .

[0040] Compared with the first embodiment, the working principle of this embodiment is that the optical displacement measuring dev...

no. 3 example

[0042] Figure 4b Schematically shows the structure of the optical interference displacement measurement system based on the optical neural network 3 of the present invention, that is, the structure of the measurement system when the optical displacement measurement device 2 is an optical interferometer, which includes: a light source 1, an optical displacement measurement device 2, An optical neural network 3 , a detector array 4 , and a signal processing device 5 .

[0043] Such as Figure 4b As shown, in this embodiment, the light source 1 is a single-frequency laser, the optical displacement measuring device 2 is a homodyne grating interferometer, and the optical neural network 3 is a passive optical neural network; wherein, the homodyne grating interferometer includes a second spectroscopic Prism 231 , reference grating 233 , measurement grating 232 .

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Abstract

The invention discloses an ultra-precise displacement measuring system based on an optical neural network. The system comprises a light source, an optical displacement measuring device, an optical neural network, a detector array and a signal processing device. When a target object moves, the system takes a measurement optical signal output by the optical displacement measuring device as a signalinput, the signal is received by the detector array after being processed by the optical neural network, and finally the signal is converted into displacement information of the target object throughthe signal processing device. The invention further discloses an ultra-precise displacement measuring method based on the optical neural network. The optical neural network is used for processing themeasurement optical signal, so that the displacement of the target object can be directly measured; the phase discrimination process of the electronic signal is not needed; the response speed is extremely high; the size can be zoomed; the energy utilization rate is high; and the system is suitable for ultra-precise measurement occasions with high speed and high dynamic performance requirements. According to the system, the multi-degree-of-freedom pose measurement of the target object also can be realized by increasing the number of input measurement optical signals and the number of detector arrays.

Description

technical field [0001] The invention relates to the technical field of ultra-precision displacement measurement, in particular to an ultra-precision displacement measurement system and method based on an optical neural network. Background technique [0002] Optical measurement technology plays an important role in ultra-precision displacement measurement systems, mainly including grating scales based on the principle of Moiré fringes and interferometers based on the principle of optical interference. As a typical displacement sensor, the optical displacement measurement system has the advantages of traceability of length, high measurement accuracy, large measurement range, large dynamic measurement range, low cost, easy installation and debugging, etc., and is widely used in precision and ultra- In the field of precision measurement, it is commonly used in closed-loop servo systems of precision machinery and processing equipment. [0003] The grating ruler displacement sens...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/02G06N3/067
CPCG01B11/02G06N3/067
Inventor 张鸣朱煜王磊杰杨富中叶伟楠李鑫赵家琦
Owner TSINGHUA UNIV
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