Renewable universal terahertz metamaterial sensor
A sensor and general-purpose technology, applied in the direction of material analysis, analysis materials, instruments, etc. through optical means, can solve problems such as difficult to reuse, poor specificity, high detection cost, etc., and achieve stable and reliable results
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[0040] Renewable general-purpose terahertz metamaterial biosensors: including terahertz metamaterial chips, general-purpose immobilized probes coated on the surface of metamaterial chips and aptamers containing specific enzyme cleavage sites, specific adapters for different targets Ligands are immobilized in different reactive modules of the metamaterial. The structure and scanning electron microscope images of terahertz metamaterials are shown in figure 1As shown, the substrate of the terahertz metamaterial is silicon, and the material selected for the metal structure is gold. The metamaterial structure is produced by photolithography, and the production process includes coating, coating, exposure, wet etching and stripping. The geometric parameters of the metamaterial include the thickness of the substrate silicon h=500 μm, the opening width g=2 μm, the distance between the rings in the structural unit d=4 μm, the width of the structural unit w=2 μm, and the thickness of th...
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