Optical system focal length measurement system and method
An optical system and measurement system technology, applied in the field of optical system focal length measurement system, can solve problems such as low focus positioning accuracy, and achieve the effect of improving measurement accuracy and precision, high repeatability, and high-precision positioning and measurement
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[0042] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0043] The invention provides an optical system focal length measurement system, that is, a laser confocal self-collimation optical system, which utilizes the strict conjugate characteristics of the incident focus and the self-collimation focus of the laser confocal self-collimation optical system, and the axial precision focusing characteristic And lateral high-resolution characteristics, realize the precise positioning of the laser light source emitted by the laser point illumination positioning module on the axis of the laser confocal auto-collimation optical system, and the precise positioning of the point detection and positioning module on the laser confocal auto-collimation optical system On-axis focus and off-axis focus of the self-collimation axis, the accurate change Δy of the position between the two is measured; precision angle measu...
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