Control system for sheet substrate vacuum coating production line

A control system and vacuum coating technology, applied in vacuum evaporation coating, sputtering coating, ion implantation coating, etc., can solve the problems of inconvenient data management, cumbersome electric cabinet wiring, low production efficiency, etc., and achieve data exchange Fast and convenient, clear programming address distribution, saving manpower and material resources

Active Publication Date: 2019-01-25
GUANGDONG ZHENHUA TECH CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] (1) The system framework is complex: most of them use multiple low-end PLC controls, and there will be problems with unclear distribution of multiple PLC addresses during the programming process;
[0005] (2) The operation is cumbersome and inhumane: the system is relatively scattered, and the operation of each function basically requires an operator, and the total number of operators is large;
[0006] (3) The degree of intelligence is not high: the system does not have data statistics, which is inconvenient for production line managers to manage the data of machines and operators;
[0007] (4) The wiring of the electric cabinet is messy and the degree of maintenance is large: due to the complex frame of the production line, the wiring of the electric cabinet is cumbersome and unsightly, and it is also inconvenient for maintenance personnel to repair;
[0008] (5) Each production process is independent, there are control errors in multiple connections, and the production efficiency is low

Method used

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  • Control system for sheet substrate vacuum coating production line
  • Control system for sheet substrate vacuum coating production line

Examples

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Embodiment Construction

[0025] Such as figure 1 As shown, a sheet-type substrate vacuum coating production line, which sequentially includes a loading table 10', a film feeding chamber 20', a heating chamber 30', a front buffer chamber 40', and three mutually independent The magnetron sputtering vacuum coating chamber 50', 60', 70', the rear buffer chamber 80', the cooling chamber 90' and the unloading table 100' also include a transport mechanism for transporting the substrate (not shown in the figure ).

[0026] Such as figure 2 As shown, the present invention matches the control system of the above-mentioned chip substrate vacuum coating production line, including a host computer 1, and a PLC main substrate 2 connected to the host computer 1 by Ethernet communication, and the PLC main substrate 2 is connected to There is a PLC extension substrate 3, the PLC extension substrate 3 is connected with a transmission communication system 4, a pre-vacuum system 5, a front transmission system 6, a fron...

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Abstract

The invention belongs to the technical field of vacuum coating, and particularly relates to a control system for a sheet substrate vacuum coating production line. The system comprises a host computer,a PLC main substrate in Ethernet communication connection with the host computer and a PLC extension substrate connected to the PLC main substrate, a transmission communication system, a pre-vacuum system, a front drive system, a front coating system and a vacuum measurement system are connected to the PLC extension substrate, and the PLC main substrate is connected with a fault alarm system, a smart meter communication system, a main vacuum system, a main drive system and a main coating system. The control system has a good verification effect, can achieve simple and convenient operation ofthe production line, reduces operators, provides data statistics, reduces management costs, and improves production efficiency.

Description

technical field [0001] The invention belongs to the technical field of coating production, and in particular relates to a control system for a vacuum coating production line of sheet substrates. Background technique [0002] In the existing technology, the degree of intelligence and automation of industrial production lines is increasing day by day. In addition to meeting the basic process requirements, it is also necessary to consider various factors such as economic costs and management costs of the production line. The specific performance is high production efficiency and convenient operation. , intelligent big data statistics, less dependence on human resources, etc. [0003] Most of the existing horizontal magnetron sputtering coating production lines are stand-alone machines, and most of the control systems are sub-frames, that is, there is a control system for each function, and there are the following problems to be improved: [0004] (1) The system framework is co...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/54C23C14/35
CPCC23C14/35C23C14/54
Inventor 潘振强陈健鹏
Owner GUANGDONG ZHENHUA TECH CO LTD
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