A Fabrication Method of On-Chip Terahertz Unidirectional Transmitter Based on Subwavelength Structure
A sub-wavelength structure and one-way transmission technology, applied in waveguide devices, circuits, electrical components, etc., can solve the problems of device miniaturization, narrow working bandwidth and large-scale practical integration of devices, etc. Effect of low, high forward-to-reverse transmittance ratio
Active Publication Date: 2021-09-24
NANKAI UNIV
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Problems solved by technology
At present, there are few researches on functional devices in the terahertz frequency band in China, and the miniaturization and narrow working bandwidth of devices hinder large-scale practical integration of devices.
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Embodiment
[0046] A method for manufacturing an on-chip terahertz one-way transmitter based on a subwavelength structure. The specific implementation steps are as follows:
[0047] (1) Use numerical simulation to simulate the reflection phase of antennas with different lengths; then design 52 metal antennas on the surface of the waveguide according to the momentum required for mode conversion, and the phase difference between adjacent antennas The interval Λx=30 μm.
[0048] (2) Use laser etching technology to etch a cross-section of 200*50μm on a sheet material with a thickness of 50μm 2 The rectangular waveguide, the material property is x tangential lithium niobate;
[0049] (3) Using ultraviolet lithography technology and magnetron sputtering technology, a 100nm thick metal antenna is plated on a fixed position on the surface of the rectangular waveguide. The midpoint of the antenna is offset from the centerline of the rectangular waveguide by 20 μm and rotated by 40°. Hertz one-w...
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Abstract
The invention discloses a preparation method of an on-chip terahertz one-way transmitter based on a sub-wavelength structure, the purpose of which is to reduce the serious damage to the laser caused by the reflected light returning to the integrated laser, especially the impact produced under higher optical power ; And solve the problem of signal interference in the optical path caused by the reflection of other devices in the optical path. The adopted scheme is: plate the antenna array metasurface with gradient structure on the specific position of the subwavelength rectangular waveguide. The metasurface strongly interacts with the waveguide modes and provides additional unidirectional momentum compensation for the waveguide modes, thereby realizing waveguide mode conversion and unidirectional energy transmission. The invention has the characteristics of simple device, easy manipulation, small size, high forward-backward transmission ratio, etc., and is beneficial to the development and application of terahertz integrated optics.
Description
technical field [0001] The invention relates to a preparation method of a miniaturized terahertz band functional device, which is especially suitable for a broadband terahertz one-way transmission device for future communication. Background technique [0002] Since the special position of the terahertz wave frequency band is between microwave and infrared rays, it has a series of special properties, such as: transient, strong penetration, low energy, and safety for biological detection, etc., which makes terahertz waves in National defense security, biomolecular monitoring, non-destructive imaging, medical diagnosis, security inspection and other fields have broad application prospects. With the continuous development of wireless communication requirements and technologies in the future, it is necessary to continuously develop new spectrum resources and increase the information transmission rate. Terahertz frequency band (0.1-10THz) spectrum resources have large-capacity and...
Claims
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IPC IPC(8): H01P1/32H01P11/00
CPCH01P1/32H01P11/00
Inventor 吴强王日德张琦张斌赵文娟齐继伟姚江宏许京军
Owner NANKAI UNIV