On-chip broadband terahertz unidirectional transmitter combining gradual-change metasurface and sub-wavelength waveguide
A one-way transmission and metasurface technology, applied in waveguide devices, electrical components, circuits, etc., can solve the problems of device miniaturization, narrow working bandwidth and large-scale practical integration of devices, and achieve simple, easy to control and low cost , the effect of high forward-reverse transmittance ratio
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[0047] The specific implementation steps of an on-chip broadband terahertz unidirectional transmission device combined with graded metasurface and subwavelength waveguide are as follows:
[0048] (1) Use numerical simulation to simulate the reflection phase of antennas with different lengths; then design 52 metal antennas on the surface of the waveguide according to the momentum required for mode conversion, and the phase difference between adjacent antennas The interval Λx=30 μm.
[0049] (2) Use laser etching technology to etch a cross-section of 200*50μm on a sheet material with a thickness of 50μm 2 The rectangular waveguide, the material property is x tangential lithium niobate;
[0050] (3) Using ultraviolet lithography technology and magnetron sputtering technology, a 100nm thick metal antenna is plated on a fixed position on the surface of the rectangular waveguide. The midpoint of the antenna is offset from the centerline of the rectangular waveguide by 20 μm and ro...
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