Silicon-based cavity shielding filter

Abstract

The invention relates to a silicon-based cavity shielding filter, which is fabricated by a MEMS process. The silicon-based cavity shielding filter comprises a first substrate, a second substrate, an intermediate layer and a metal suspension circuit; the first substrate and the second substrate adopt a high resistance silicon substrate; the first substrate, the intermediate layer and the second substrate are sequentially stacked and combined into a silicon cavity structure; a microwave ground electrode is arranged on the intermediate layer; a metal shielding layer connected with the microwave grounding electrode is arranged on the outer surface of the silicon cavity structure; a first air cavity is formed between the first substrate and the intermediate layer, and/or a second air cavity isformed between the second substrate and the intermediate layer; the metal suspension circuit is disposed on a surface of the intermediate layer and suspended in the first air chamber or/and the secondair chamber. The silicon-based cavity shielding filter of the invention is fabricated by the silicon-based MEMS process, so that the final filter has the advantages of small size, high quality factors, excellent performance, good integration, batchization, etc., and can achieve higher integration and an integrated system with a smaller size.

Description

Technical field [0001] The invention relates to a silicon-based micro-shielding MEMS filter with a multilayer structure, which belongs to the fields of micromechanical (MEMS) systems, microwave circuits, microelectronics and crossover technologies, and mainly relates to filters in microwave operating frequency bands. Background technique [0002] Microwave filter is one of the important microwave components. Especially at the front end of the receiver, the performance of the microwave filter directly affects the overall performance of the receiver. With the development of microwave communication technology, especially satellite communication and mobile communication systems, microwave filters are increasingly required to have the characteristics of smaller size, higher integration, lower loss, and higher performance. [0003] Traditional planar microwave filters, such as microstrip, stripline, substrate integrated waveguide, etc., have large structure loss and low quality factor; ...

AI Technical Summary

Problems solved by technology

[0004] The technical problem to be solved by the present invention is that the planar form of the microwave filter structure has large loss and low quality factor, while the non-planar form of the metal cavity has the disadvantages of heavy weight, large volume, high processing cost, and inability to perform high-density integration.

Images