Time-delay stable plasma medium-frequency power supply

An intermediate frequency power supply and plasma technology, applied in the direction of electrical components, electronic switches, high-efficiency power electronic conversion, etc., can solve problems that affect the reliability of equipment systems, affect product failure rates, and complex delay circuits, etc., to improve the power of switching power supplies, Does not affect the delay effect, the effect of small power loss

Inactive Publication Date: 2019-03-01
CHANGSHA QIUDIANBING INFORMATION TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] The conventional intermediate frequency power supply generally includes two links, namely the front pole voltage stabilizing part and the rear pole intermediate frequency inverter part. Basically, separate components are used. Although there are no traditional rotating parts, the volume is still large, the efficiency is low, and the structure is complicated. There are many reliability factors, which directly affect the reliability of the equipment and even the entire system; the generation of the intermediate frequency of the traditional intermediate frequency power supply mostly depends on the RC oscillator or the self-resonant oscillation of L, R, and C, and the generated frequency is unstable; the existing Plasma intermediate frequency power supply is industrial frequency power supply controlled by thyristor, and its output performance is poor
[0003] In addition, in the protection of the circuit, the delay circuit currently used is relatively complicated, which affects the failure rate of the product, and is large in size and poor in applicability

Method used

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  • Time-delay stable plasma medium-frequency power supply
  • Time-delay stable plasma medium-frequency power supply
  • Time-delay stable plasma medium-frequency power supply

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0028] Such as figure 1 As shown, this embodiment provides a time-delay stable plasma intermediate frequency power supply, including: three-phase 18-pulse controllable rectification circuit 1, rectification and filtering delay start circuit 2, filter energy storage circuit 3, IGBT drive circuit 4, LC A series resonant circuit 5 , an intermediate frequency transformer 6 , a variable capacitor 7 and an EMC management circuit 8 .

[0029] The input terminal of the three-phase 18-pulse controllable rectifier circuit 1 adopts a three-phase AC 380V input, and the first output terminal of the three-phase 18-pulse controllable rectifier circuit 1 is connected to the input terminal of the filter energy storage circuit 3 connected, the second output end of the three-phase 18-pulse controllable rectification circuit 1 is connected to the input end of the rectification filter delay start circuit 2, and the first output end of the filter energy storage circuit 3 is connected to the IGBT T...

Embodiment 2

[0037] Such as Figure 4 As shown, a feedback control circuit 9 is also included, and the feedback control circuit 9 is connected to the filter energy storage circuit 3 through a frequency conversion circuit 10, wherein the input terminal of the frequency conversion circuit 10 is connected to the first filter energy storage circuit 3 The two output terminals are connected, the output terminal of the frequency conversion circuit 10 is connected with the input terminal of the feedback control circuit 9 , and the output terminal of the feedback control circuit 9 is connected with the intermediate frequency transformer 6 .

[0038] The feedback control circuit 9 includes current feedback and voltage feedback, which are used to ensure the stability of the output voltage and output current when the load changes, and use PWM pulse width modulation to maintain the stability of the output voltage.

[0039] Specifically, such as Figure 5 As shown, when the output voltage passes throug...

Embodiment 3

[0041] Such as Figure 6 As shown, the rectification and filtering delay start circuit 2 is composed of triodes Q1, Q2, resistors R1, R2, R3, and R4. Capacitor charging, used to delay the instantaneous increase of current.

[0042] The input end of the rectification filter delay starting circuit 2 is connected in series with the base stage of the triode Q1, and the resistor R1 is connected in series with the diode D5, which is used to protect the circuit to the greatest extent without affecting the delay.

[0043] Specifically, during the delay period, the three-phase AC power supply slowly charges the energy storage capacitor through the resistors R1, R2, R3, and R4. When a pulse signal appears at the access point, Q1 can be turned on instantly. When the pulse signal disappears , C13 can maintain conduction for a certain period of time. During the experiment, the rectification and filtering delay start circuit 2 is connected to 50V 5Hz pulses for many times, and the high lev...

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PUM

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Abstract

The invention discloses a time-delay stable plasma medium-frequency power supply. The time-delay stable plasma medium-frequency power supply comprises a three-phase 18 pulse wave controllable rectifying circuit, a rectifier filter time-delay starting circuit, a filter energy storage circuit, an IGBT drive circuit, an LC series resonant circuit, a medium-frequency transformer, a variable capacitorand an EMC management circuit, wherein the first output end of the three-phase 18 pulse wave controllable rectifying circuit is connected with the input end of the filter energy storage circuit, the second output end of the three-phase 18 pulse wave controllable rectifying circuit is connected with the input end of the rectifier filter time-delay starting circuit, the first output end of the filter energy storage capacitor is connected with the input end of the IGBT drive circuit, the output end of the IGBT drive circuit is connected with the input end of the LC series resonant circuit, and the output end of the LC series resonant circuit is connected with the input end of the medium-frequency transformer; the input end of the EMC management circuit is connected with the output end of a three-phase alternating current power supply serving as a power supply, and the first output end of the EMC management circuit is connected with the input end of the three-phase 18 pulse wave controllable rectifying circuit. According to the time-delay stable plasma medium-frequency power supply, the stability of a time-delay circuit can be improved.

Description

technical field [0001] The invention relates to the field of plasma intermediate frequency power supply, in particular to a time-delay stable plasma intermediate frequency power supply. Background technique [0002] Conventional intermediate frequency power supply generally includes two links, that is, the front pole is a voltage stabilizing part, and the rear pole is an intermediate frequency inverter part. Basically, separate components are used. Although there are no traditional rotating parts, the volume is still large, the efficiency is low, and the structure is complicated. There are many reliability factors, which directly affect the reliability of the equipment and even the entire system; the generation of the intermediate frequency of the traditional intermediate frequency power supply mostly depends on the RC oscillator or the self-resonant oscillation of L, R, and C, and the generated frequency is unstable; the existing Plasma intermediate frequency power supply i...

Claims

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Application Information

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IPC IPC(8): H02M5/458H02M1/12H02M1/44H03K17/28
CPCH02M1/12H02M1/44H02M5/4585H03K17/28Y02B70/10
Inventor 不公告发明人
Owner CHANGSHA QIUDIANBING INFORMATION TECH CO LTD
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