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Single-molecule substrate strain sensing device and preparing method thereof

A strain sensing, single-molecule technology, which is applied in measurement devices, optical devices, and force measurement by measuring the change of optical properties of materials when they are stressed. Difficulty meeting requirements, etc.

Active Publication Date: 2019-03-08
WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] This disclosure provides a single-molecule substrate strain sensing device and its preparation method, which solves the technical problem that the strain area and strain amount of the substrate are too small, and the measurement technology is difficult to meet the requirements

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  • Single-molecule substrate strain sensing device and preparing method thereof
  • Single-molecule substrate strain sensing device and preparing method thereof
  • Single-molecule substrate strain sensing device and preparing method thereof

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Embodiment 1

[0037] Such as figure 1 As shown, this embodiment provides a single-molecule substrate strain sensing device 100. Since the single-molecule substance is sensitive to strain and easy to detect, the single-molecule substance can be used as a sensing medium to measure the substrate strain The physical and chemical changes of the monomolecular species are caused to characterize the micro-strain of the micro-region of the substrate. Single-walled carbon nanotubes (Single-Walled Carbon Nanotubes, SWNT) is a one-dimensional tubular structure with a nanometer-scale diameter formed by curling single-layer graphene in a certain way. Because SWNT has a high aspect ratio, high-temperature structural stability and The vibration frequency of carbon atoms changes when subjected to strain, which is very suitable for strain detection of the substrate. Therefore, the unimolecular substance can be selected as SWNT, and this embodiment is described by taking the unimolecular substance selected a...

Embodiment 2

[0048] Such as Figure 3A-3F As shown, the present embodiment provides a method for preparing a single-molecule substrate strain sensing device. The strain of a micro-region with a size of 1 um×1.5 um in the substrate 11 is used as an example to describe in detail. The method includes the following steps:

[0049] S10: Select an aluminum foil 16, and prepare a monomolecular substance on the surface of the aluminum foil 16, and the monomolecular substance is SWNT12;

[0050] Such as Figure 3A As shown, an aluminum foil 16 is selected, and the SWNT12 is prepared on the surface of the aluminum foil 16 by a floating catalyst chemical vapor deposition method. The SWNT12 prepared by this method has high purity, simple equipment and low cost. At the same time, in order to facilitate the subsequent transfer of the SWNT12 to the upper surface of the substrate 11, the density of the SWNT12 should not be too high and the phenomenon of entanglement between the SWNT12 should not occur, s...

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Abstract

The invention provides a single-molecule substrate strain sensing device and a preparing method thereof. The single-molecule substrate strain sensing device comprises a substrate, a single-molecule material and a Raman spectrometer; patterns are periodically arranged on the surface of the substrate, the single-molecule material is attached to the surface of the substrate in a predetermined direction, the two ends of the single-molecule material are fixed to the surface of the substrate, and the Raman spectrometer is arranged above the substrate and used for collecting a Raman curve of the single-molecule material when the substrate is strained. The strain capacity of the substrate is represented by the offset of a Raman G' peak position when a single-molecule material of a carbon nano tubeis strained, small strain of a tiny substrate zone can be detected, and improvement of the manufacturing precision and manufacturing efficiency of displayers, semiconductors and other industries is facilitated.

Description

technical field [0001] The present disclosure relates to the field of display technology, in particular to a single-molecule substrate strain sensing device and a preparation method thereof. Background technique [0002] In the fields of display manufacturing and chip manufacturing, it is necessary to make microscopic patterns on glass or silicon substrates through a series of processes such as film formation, exposure, and etching. However, during the fabrication process, temperature changes, pillars and other reasons will cause strain on the substrate, thereby affecting the precision of the microscopic pattern. Therefore, it is necessary to monitor the strain of the substrate so as to adjust the process parameters. At present, the difficulty of substrate strain monitoring is that the strain area and strain amount are too small, and the measurement technology is difficult to meet the requirements. [0003] Currently commonly used strain measurement techniques include resi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/16G01N21/65
CPCG01B11/16G01N21/65G01L1/24
Inventor 罗成志
Owner WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD