Ultrahigh vacuum heating device and heating method thereof

Abstract

The invention relates to an ultrahigh vacuum heating device and a heating method thereof. The ultrahigh vacuum heating device comprises an adapter, a sample groove, a direct current heating brush system, a positioning conductive jack, wherein the adapter can be connected with a magnetic rod, and an entire sample table can be transmitted out and into an ultrahigh vacuum system through the adapter;a sample and the heating sample table can be moved through the sample groove; the direct current heating brush can realize directional transmission of direct current on the sample in the combination with a specific sample frame; a positioning plug arranged in the cavity can be inserted through the positioning conductive jack, and thus the positioning of the sample table is realized, and the connection with a circuit outside the cavity can be realized, so that the direct current heating without damaging vacuum is realized; and the heating table has a hollow structure in the center, an infraredlaser heater can be used to realize laser heating of the sample in combination with the specific sample frame. The device can realize good heating capability to the sample while maintaining an ultrahigh vacuum environment, and has the advantages of high heating speed, high temperature, small temperature gradient and accurate temperature measurement.

Description

technical field [0001] The invention belongs to the technical field of vacuum heating, in particular to an ultra-high vacuum heating device and a heating method thereof. Background technique [0002] Vacuum refers to the pressure below atmospheric pressure (10 5 Pa) gas space, according to the range of vacuum, usually can be divided into rough vacuum (10 5 -10 3 Pa), low vacuum (10 3 -10 -1 Pa), high vacuum (10 -1 -10 -6 Pa), ultra-high vacuum (10 -6 -10 -10 Pa) and extremely high vacuum (<10 -10 Pa). In the field of ultra-high vacuum, the existence of gas molecules, including molecules adsorbed on the walls of vacuum containers, is almost negligible, and the maintenance time of solid clean surfaces can be relatively extended. Vacuum technology is widely used in electronic technology, aerospace technology, accelerators, surface physics, microelectronics, material science and other fields. In particular, in a vacuum environment, research in the fields of surface...

AI Technical Summary

Problems solved by technology

[0004] At present, my country's high-end vacuum equipment R & D and production and technology popularization are far from meeting the needs, let alone have the strength to compete directly with international competitors. A considerable proportion of the country's annual scientific research funds are used to purchase foreign scientific research equipment , which not only makes our country's scientific research controlled by others, but also makes it difficult to have original scientific research results

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