A Method for Analyzing Optical Properties of Film-Substrate-Film System Containing Substrate Features
A technology of optical characteristics and analysis methods, which is applied in the direction of material analysis, material analysis, phase influence characteristic measurement by optical means, etc., which can solve the refractive index difference, affect the spectral performance of the film-substrate-film system, and damage the subsurface of the optical substrate. Layers cannot be completely eliminated, etc.
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Embodiment 1
[0100] In this example:
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[0101] Example: The spectral characteristics of the anti-reflection film on the surface of 6mm zinc sulfide material at 7.5-9.7μm;
[0102] 1) For the optical constants of zinc sulfide materials, see the attached figure 1 ;
[0103] 2) The subsurface layer of the zinc sulfide material is layered with 1000 layers, the thickness is 10 μm, and the refractive index gradient is -2%. The refractive index function of the equivalent graded refractive index film is shown in the appendix figure 2 ;
[0104] 3) Forward reflectance, backward reflectance and transmittance spectra of the two surfaces of zinc sulfide, see attached image 3 ;
[0105] 4) The reflectance spectrum of the thin film-zinc sulfide-thin film system is shown in the attached Figure 4 , compared with the case without subsurface damage, the shape of the reflectance spectrum is similar, but the central wavelength shifts, and the reflectance spectra of different wavelengths are modulated;
[0106] 5) The transmitta...
Embodiment 2
[0108] In this example:
[0109] Example: 532nm wavelength frequency doubling separation film spectral characteristics on fused silica surface;
[0110] 1) The optical constants of the fused silica material are shown in the appendix Figure 6 ;
[0111] 2) The subsurface layer of the fused silica material is layered with 1000 layers, the thickness is 10 μm, and the refractive index gradient is -5%. The refractive index function of the equivalent graded refractive index film is shown in the appendix Figure 7 ;
[0112] 3) Forward reflectance, backward reflectance and transmittance spectra of the first surface short-pass multilayer film, see attached Figure 8 ;
[0113] 4) The reflectance and transmittance spectra of the second surface anti-reflection multilayer coating, see attached Figure 9 ;
[0114] 5) The reflectance spectrum of the short-wave pass film-fused silica-anti-reflection film system is shown in the appendix Figure 10 , focusing on the transmittance at ...
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