Automatic surface defect detecting device and automatic surface defect detecting method for large-opening curved-surface optical elements

Abstract

The invention relates to an automatic surface defect detecting device and an automatic surface defect detecting method for large-opening curved-surface optical elements, and belongs to the technical field of photoelectric detection. The automatic surface defect detecting device comprises a measuring head, a rotary worktable, an automatic sampling device and a spraying device. The measuring head comprises a sensor system, an illuminating system and an imaging system, the illuminating system is used for providing high-uniformity and high-luminance illumination for a surface of a detected sample,and the rotary worktable and the imaging system are used for performing annular scanning and high-resolution scattering imaging on defects in an optical surface area. The automatic sampling device isused for automatically clamping an optical element by a mechanical arm in automated production. Once only foreign matters such as dust and impurities are detected on a surface of the optical element,the spraying device is activated to remove the pseudo-flaws including the dust and the impurities accurately. The automatic surface defect detecting device and the automatic surface defect detectingmethod for the large-opening curved-surface optical elements solve the problem that detection of defects on the surfaces of the large-opening curved-surface optical elements is difficult and low in efficiency, and the surface defects on large-opening plane-surface optical elements, large-opening spherical-surface optical elements and large-opening aspheric-surface optical elements can be measuredquickly.

Description

technical field [0001] The invention belongs to the field of advanced optical manufacturing and detection, and relates to an optical detection device, in particular to an automatic detection device and method for surface defects of large-caliber curved optical elements. Background technique [0002] With the continuous development of advanced optical manufacturing technology, application fields such as microelectronics equipment, aerospace, precision measurement and laser systems have put forward higher technical requirements for the surface processing quality of precision optical components, which are their core components. After grinding and polishing, the surface of curved optical components often has various defects (such as scratches, depressions, cracks, chipping and other surface defects), these defects will not only reduce the user experience, but even affect the performance of the optical system. [0003] The surface defect detection of large-aperture curved optical...

AI Technical Summary

Problems solved by technology

After grinding and polishing, the surface of curved optical components often has various defects (such as scratches, depressions, cracks, chipping and other surface defects), these defects will not only reduce the user experience, but even affect the performance of the optical system

[0003] The surface defect detection of large-caliber curved optical components is still dominated by manual qualitative detection. The current mainstream manual visual inspection is not only inefficient, but also has poor subjective judgment accuracy, which seriously restricts the automation process of advanced optical manufacturing.

In recent years, the defect detection technology based on machine vision has attracted the attention of many researchers, but the current method has low detection accuracy and takes a long time, which cannot meet the real-time detection needs of the current industrial site.

And it is powerless to detect surface defects on curved surfaces

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