Optical fiber MEMS microphone array acoustic detection plate and system

A microphone array and microphone technology, which is applied in the direction of measuring ultrasonic/sonic/infrasonic waves, measuring devices, utilizing wave/particle radiation, etc., can solve the problems of limited application scenarios, high manufacturing process requirements, complex structure, etc., and achieve easy preparation and assembly, Improved sensitivity and high detection accuracy

Active Publication Date: 2019-03-22
UNIV OF ELECTRONIC SCI & TECH OF CHINA
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Problems solved by technology

[0003] At present, there are mainly the following types of similar acoustic detection: 1. Electronic microphone arrays are mostly used in sound source localization, and planar circular arrays are mostly used for far-field sound source localization. In terms of algorithms, cross-correlation delay algorithms are mostly used. The structure of the method is complex, the positioning accuracy is insufficient, and the application scenarios are limited, and it cannot be applied to scenarios that requir

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  • Optical fiber MEMS microphone array acoustic detection plate and system
  • Optical fiber MEMS microphone array acoustic detection plate and system
  • Optical fiber MEMS microphone array acoustic detection plate and system

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Embodiment 1

[0029] The present embodiment provides a kind of optical fiber MEMS microphone array acoustic detection plate, its structure is as follows figure 1 As shown, it is composed of optical fiber MEMS microphone acoustic wave sensors distributed in a 4*8 array; the structure of optical fiber MEMS microphone acoustic wave sensors is as follows figure 2 Shown: including substrate 1, MEMS diaphragm 2, capillary glass tube 3, optical fiber 4;

[0030] A first-level groove 5 is formed at the center of the upper surface of the substrate 1, a second-level groove 6 is formed at the center of the bottom of the first-level groove, and an optical fiber hole 7 through the substrate is formed at the center of the bottom of the second-level groove; The lower surface of the substrate 1 is provided with a ventilation hole 9 to allow the air to circulate between the second-level groove 6 and the outside world; image 3 , Figure 4 shown;

[0031] The upper surface of the MEMS diaphragm has perio...

Embodiment 2

[0037] The present embodiment provides a kind of detection system that comprises the optical fiber MEMS microphone array acoustic detection plate in embodiment 1, such as Figure 12 As shown; including ASE light source, coupler, optical fiber MEMS microphone array acoustic detection board, 32 circulators, 32 photodetectors and FPGA, it is characterized in that the optical fiber MEMS microphone array acoustic detection board includes 32 optical fiber MEMS microphone acoustic wave sensors , each optical fiber MEMS microphone acoustic wave sensor circulator is connected to a circulator through optical brazing, and the circulator is connected to a photodetector; the laser light emitted by the ASE light source is first divided into 4 equal-proportion laser beams through a 1*4 coupler, and each laser beam is then After passing through the 1*4 coupler, a total of 16 equal-proportion laser beams are separated at this time, and each laser beam passes through a 1*2 coupler, and a total o...

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Abstract

The invention relates to the field of optical fiber acoustic sensors, and particularly provides an optical fiber MEMS microphone array acoustic detection plate and system. The optical fiber MEMS microphone array acoustic detection plate and system are used for filling up the blank of acoustic detection and sound localization through array combining of optical fiber MEMS microphones. According to the optical fiber MEMS microphone array acoustic detection plate and system, an MEMS membrane is applied to optical fiber acoustic sensors, the sensitivity of the optical fiber microphone acoustic sensors is improved, the preparation and assembly are more convenient, and the optical fiber MEMS microphone array acoustic detection plate and system have the advantages of being small in size, free of metal, high in sensitivity and the like; the optical fiber MEMS microphone array acoustic detection plate and system can be better applied to monitoring occasions, locating occasions and other occasions which need high invisibility, and can also be better applied to far-distance space sound localization, non-contact fault audio detection of a mechanical device, remote sound signal pickup and otherfields; meanwhile, the single-point optical fiber MEMS microphone acoustic sensors are subjected to array combining, and the sound signals can be detected and located.

Description

technical field [0001] The invention relates to the field of optical fiber acoustic wave sensor, relates to a novel acoustic array detection system, and specifically provides an optical fiber MEMS microphone array acoustic wave detection board and a system. technical background [0002] With the acceleration of the intelligent industry, it also promotes the development of the sensor industry. Among them, fiber optic sensors are gradually widely used in military defense, Engineering testing and harsh environment detection. As a derivative product of fiber optic sensor, fiber optic acoustic wave sensor has all the advantages of fiber optic sensor, and because of its high sensitivity, it can quickly collect acoustic signals, and the probe is small and easy to hide, so it is more used in monitoring and water monitoring. Under fiber optic sonar detection. [0003] At present, there are mainly the following types of similar acoustic detection: 1. Electronic microphone arrays are...

Claims

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Application Information

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IPC IPC(8): G01H9/00
CPCG01H9/004
Inventor 张海鑫吴宇王美玲刘涛唐杰陈世豪饶云江
Owner UNIV OF ELECTRONIC SCI & TECH OF CHINA
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