Optical fiber MEMS microphone array acoustic detection plate and system

Abstract

The invention relates to the field of optical fiber acoustic sensors, and particularly provides an optical fiber MEMS microphone array acoustic detection plate and system. The optical fiber MEMS microphone array acoustic detection plate and system are used for filling up the blank of acoustic detection and sound localization through array combining of optical fiber MEMS microphones. According to the optical fiber MEMS microphone array acoustic detection plate and system, an MEMS membrane is applied to optical fiber acoustic sensors, the sensitivity of the optical fiber microphone acoustic sensors is improved, the preparation and assembly are more convenient, and the optical fiber MEMS microphone array acoustic detection plate and system have the advantages of being small in size, free of metal, high in sensitivity and the like; the optical fiber MEMS microphone array acoustic detection plate and system can be better applied to monitoring occasions, locating occasions and other occasions which need high invisibility, and can also be better applied to far-distance space sound localization, non-contact fault audio detection of a mechanical device, remote sound signal pickup and otherfields; meanwhile, the single-point optical fiber MEMS microphone acoustic sensors are subjected to array combining, and the sound signals can be detected and located.

Description

technical field [0001] The invention relates to the field of optical fiber acoustic wave sensor, relates to a novel acoustic array detection system, and specifically provides an optical fiber MEMS microphone array acoustic wave detection board and a system. technical background [0002] With the acceleration of the intelligent industry, it also promotes the development of the sensor industry. Among them, fiber optic sensors are gradually widely used in military defense, Engineering testing and harsh environment detection. As a derivative product of fiber optic sensor, fiber optic acoustic wave sensor has all the advantages of fiber optic sensor, and because of its high sensitivity, it can quickly collect acoustic signals, and the probe is small and easy to hide, so it is more used in monitoring and water monitoring. Under fiber optic sonar detection. [0003] At present, there are mainly the following types of similar acoustic detection: 1. Electronic microphone arrays are...

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Problems solved by technology

[0003] At present, there are mainly the following types of similar acoustic detection: 1. Electronic microphone arrays are mostly used in sound source localization, and planar circular arrays are mostly used for far-field sound source localization. In terms of algorithms, cross-correlation delay algorithms are mostly used. The structure of the method is complex, the positioning accuracy is insufficient, and the application scenarios are limited, and it cannot be applied to scenarios that require concealed anti-detection and special anti-electromagnetic; 2. The fiber-optic microphone acoustic wave sensor based on a single-point microphone can detect sound but cannot Accurate positioning, and the sound pressure sensitive diaphragms that make up the fiber optic microphone acoustic sensor are mostly made of polymers, metal films and other materials. The production process requires high requirements, poor consistency, and poor long-term stability. It is not suitable for large-scale arrays.

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