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Piezoelectric sensor

A piezoelectric sensor and piezoelectric film technology, applied in the field of sensors, can solve the problems of reducing the frequency range of the device, the coincidence of the center of mass of the central column, and increasing the size and quality of the components, so as to improve the intrinsic vibration frequency and reduce the size. , the effect of improving uniformity

Pending Publication Date: 2019-03-22
佛山市卓膜科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since the intrinsic resonant frequency of the device is inversely proportional to the thickness of the material, increasing the thickness of the piezoelectric ceramic sheet will reduce the resonant frequency of the device and reduce the operating frequency range of the device. The resonant frequency of the existing piezoelectric sensor is only 60kHz
[0006] In addition, due to the different materials and density distribution of each part of the piezoelectric ceramic sheet, and there are errors in machining, it is difficult for the position of the center column to coincide with the center of mass of each part, resulting in eccentricity
[0007] Further, due to the existence of the central column, the size and mass of the components are increased. The general outer diameter of the existing piezoelectric sensor is 9mm, and the weight is above 5g, which limits the use of the device.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0049] A piezoelectric sensor such as Figure 5 As shown, it includes a base 1, a first adhesive layer 2, a piezoelectric film layer 3, a second adhesive layer 4 and a quality block 5 arranged on the base 1 in sequence, and the bottom edge of the quality block 5 is provided with a vacancy , the second adhesive layer 4 is filled in the vacant part to form a connection between the mass block 5 and the piezoelectric film layer 3, the mass block 5 is made of copper, and its weight is 0.3g;

[0050] The piezoelectric film layer 3 includes a support body, a first electrode, a piezoelectric film and a second electrode arranged on the support body in sequence, wherein the first electrode and the second electrode are both made of Pt, and both The thickness is 100nm, the piezoelectric film is a PZT film with a thickness of 2 μm, and the support body is made of Si with a thickness of 0.5mm;

[0051] It also includes a casing 6 for preventing electromagnetic signal interference, wherein ...

Embodiment 2

[0054] A piezoelectric sensor such as Figure 6 As shown, it includes a base 1, a first adhesive layer 2, a piezoelectric film layer 3, a second adhesive layer 4 and a mass 5 arranged on the base 1 in sequence, and the mass 5 is made of tungsten-copper alloy, Its weight is 0.5g;

[0055] The piezoelectric film layer 3 includes a support body, a first electrode, a piezoelectric film and a second electrode arranged on the support body in sequence, wherein the first electrode is made of Ir with a thickness of 100 nm, and the first electrode is made of Ir with a thickness of 100 nm. The two electrodes include a Cr layer and an Au layer with a thickness of 3nm and 50nm respectively, the piezoelectric film is a PZT film doped with Nb, and its thickness is 0.3 μm, and the support body is made of Al 2 o 3 Made, its thickness is 0.5mm;

[0056] It also includes a casing 6 for preventing electromagnetic signal interference, wherein a preload spring 7 is arranged between the mass bloc...

Embodiment 3

[0060] A piezoelectric sensor such as Figure 7 As shown, it includes a base 1, a first adhesive layer 2, a piezoelectric film layer 3, a second adhesive layer 4 and a quality block 5 arranged on the base 1 in sequence, and the top of the quality block 5 is provided with a concave hole, Described mass block 5 is made of copper, and its weight is 0.4g;

[0061] The piezoelectric film layer 3 includes a support body, a first electrode, a piezoelectric film and a second electrode arranged on the support body in sequence, wherein the first electrode is made of Pt with a thickness of 150nm, and the first electrode is made of Pt with a thickness of 150nm. The two electrodes include a Cr layer and an Au layer with a thickness of 3nm and 50nm respectively, and the piezoelectric film is BaTiO 3 A thin film with a thickness of 5 μm, and the support is made of Si with a thickness of 0.5 mm;

[0062] It also includes a housing 6 for preventing electromagnetic signal interference, the in...

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Abstract

The invention discloses a piezoelectric sensor, which comprises a base, a first adhesive layer, a piezoelectric film layer, a second adhesive layer and a mass block, wherein the first adhesive layer,the piezoelectric film layer, the second adhesive layer and the mass block are sequentially arranged on the base, the piezoelectric film layer includes a support body, a first electrode, a piezoelectric film and a second electrode, the first electrode, the piezoelectric film and the second electrode are sequentially arranged on the support body, and the thickness of the piezoelectric film is 0.1-10[mu]m. The piezoelectric sensor disclosed by the invention has the advantages of simple structure, small volume and light weight and is applicable to batch production.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to a piezoelectric sensor. Background technique [0002] Piezoelectric sensors are sensors based on the piezoelectric effect. Piezoelectric sensors can measure various dynamic forces, mechanical shocks and vibrations, convert force or deformation into electrical signals, and are widely used in acoustics, medicine, mechanics, navigation and other fields. [0003] Lead zirconate titanate (PZT) is a PbZrO 3 and PbTiO 3 PZT is the most widely used piezoelectric material in existing piezoelectric sensors because of its excellent piezoelectric and dielectric properties. Among them, if the ratio of Zr / Ti in PZT changes or one or two other trace elements (such as antimony, tin, manganese, tungsten, etc.) are added, its performance will also change. [0004] PZT piezoelectric acceleration sensor is a kind of PZT piezoelectric sensor. It is mainly divided into two categories: compression...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L41/053H01L41/08H01L41/113H10N30/88H10N30/00H10N30/30
CPCH10N30/88H10N30/302H10N30/704
Inventor 陈显锋
Owner 佛山市卓膜科技有限公司