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Evaporating plating device and OLED panel evaporating plating method

An evaporation and panel technology, which is applied in vacuum evaporation plating, sputtering plating, ion implantation plating, etc., can solve the problem of affecting the service life of the metal mask, shadow effect, metal mask wrinkles, and abnormal evaporation patterns and other problems, to reduce the risk of fragmentation, improve life, and avoid abnormal effects

Pending Publication Date: 2019-03-29
FUJIAN HUAJIACAI CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] For this reason, need to provide a kind of vapor deposition device, be used for solving target substrate and metal mask board sagging in the middle of existing technology, shadow effect and metal mask board wrinkle occur, affect the service life of metal mask board, and vapor deposition Abnormal pattern problem

Method used

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  • Evaporating plating device and OLED panel evaporating plating method
  • Evaporating plating device and OLED panel evaporating plating method
  • Evaporating plating device and OLED panel evaporating plating method

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Embodiment Construction

[0035] In order to explain in detail the technical content, structural features, achieved goals and effects of the technical solution, the following will be described in detail in conjunction with specific embodiments and accompanying drawings.

[0036] see Figure 1 to Figure 3 , this embodiment provides an evaporation device, which can be used for evaporation of different objects, especially for evaporation of sheet-like objects such as OLED panels.

[0037] The vapor deposition device is the same as the existing vapor deposition machine, and has a chamber for vapor deposition inside the vapor deposition machine, and a heating crucible and a holder for fixing the target substrate (that is, the object to be vapor deposited) are arranged in the chamber. magnetic board. Wherein, the heating crucible is used to hold the evaporation material and heat the evaporation material to make it evaporate; the magnetic plate is arranged above the heating crucible to fix the target substra...

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Abstract

The invention relates to the technical field of evaporating plating, and provides an evaporating plating device and an OLED panel evaporating plating method. The evaporating plating device comprises aheating crucible which is used for heating evaporating plating materials to enable the evaporating plating materials to be evaporated; and further comprises a magnetic plate which is positioned abovethe heating crucible, provided with magnetism and used for fixing a target substrate which is going to receive the evaporating plating. More than two magnetic objects are arranged in the magnetic plate, wherein the magnetism of the magnetic plate is gradually decreased from the middle to the edge. According to the technical scheme, the magnetism of the magnetic plate in the evaporating plating device is gradually decreased from the middle to the edge, so that the attraction force on the middle part of the target substrate is larger than the attraction force on the edge, the slippage of the target substrate and wrinkles on a metal mask are reduced, and the bonding degree of the metal mask and the substrate can be improved; and the phenomenon that an evaporating plating organic film patternis abnormal can be avoided, the debris risk of the target substrate can be reduced and the service life of the metal mask can be prolonged, so that the production efficiency is effectively improved,and the quality and the production progress of products are ensured.

Description

technical field [0001] The invention relates to the technical field of evaporation, in particular to an evaporation device applied to the evaporation of an organic light-emitting layer of an OLED display. Background technique [0002] Organic Light-Emitting Diode (OLED) has excellent properties such as self-illumination, ultra-thin, fast response, wide viewing angle, low power consumption, etc., making OLED display panels a hot spot and focus of current research. The preparation of the organic light-emitting layer in the OLED display usually adopts vacuum evaporation technology, that is, in the vacuum chamber, the evaporation material in the crucible is heated to evaporate and deposit on the target substrate. The existing evaporation machine mainly includes an evaporation source, a metal mask plate, a contact plate and a magnetic plate. In the evaporation film forming process, the evaporation material in the crucible is heated to pass through a metal mask with opening patte...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/04C23C14/24C23C14/50
CPCC23C14/042C23C14/243C23C14/50
Inventor 不公告发明人
Owner FUJIAN HUAJIACAI CO LTD
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