Evaporating plating device and OLED panel evaporating plating method
An evaporation and panel technology, which is applied in vacuum evaporation plating, sputtering plating, ion implantation plating, etc., can solve the problem of affecting the service life of the metal mask, shadow effect, metal mask wrinkles, and abnormal evaporation patterns and other problems, to reduce the risk of fragmentation, improve life, and avoid abnormal effects
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[0035] In order to explain in detail the technical content, structural features, achieved goals and effects of the technical solution, the following will be described in detail in conjunction with specific embodiments and accompanying drawings.
[0036] see Figure 1 to Figure 3 , this embodiment provides an evaporation device, which can be used for evaporation of different objects, especially for evaporation of sheet-like objects such as OLED panels.
[0037] The vapor deposition device is the same as the existing vapor deposition machine, and has a chamber for vapor deposition inside the vapor deposition machine, and a heating crucible and a holder for fixing the target substrate (that is, the object to be vapor deposited) are arranged in the chamber. magnetic board. Wherein, the heating crucible is used to hold the evaporation material and heat the evaporation material to make it evaporate; the magnetic plate is arranged above the heating crucible to fix the target substra...
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