A three-dimensional decoupling ultrasonic nano-vibration table

Abstract

A three-dimensional decoupling ultrasonic nanometer vibration table comprises a base. An ultrasonic vibration table is arranged on the base. The bottom of the ultrasonic vibration table and the base are in embedded connection. A first ultrasonic vibration drive mechanism and a second ultrasonic vibration drive mechanism which are used for carrying out X-direction and Y-direction ultrasonic vibration drive on a main vibration table of the ultrasonic vibration table are arranged in the ultrasonic vibration table in the direction X and the direction Y of the ultrasonic vibration table. A third ultrasonic vibration drive mechanism used for carrying out Z-direction ultrasonic vibration drive on the main vibration table of the ultrasonic vibration table is arranged at the bottom end of the ultrasonic vibration table in the direction Z of the ultrasonic vibration table. The first ultrasonic vibration drive mechanism, the second ultrasonic vibration drive mechanism and the third ultrasonic vibration drive mechanism are perpendicular to one another. The overall design is adopted by the ultrasonic vibration table; the structure is simple and compact; the first-order inherent frequency of theultrasonic vibration table can be effectively improved; and therefore the adjustable frequency range of auxiliary processing of the ultrasonic nanometer vibration table is guaranteed.

Description

technical field [0001] The invention relates to an ultrasonic nanometer vibrating table. In particular, it relates to a three-dimensional decoupling ultrasonic nano-vibration table. Background technique [0002] With the wide application of nano-devices in aerospace, biomedical, semiconductor and other fields, higher requirements are put forward for the ability of nano-processing. In the field of nano-processing, processing methods such as photolithography processing, electron beam processing, and concentrated ion beam processing are more suitable for mass production of products due to the limitation of instrument cost and processing environment. The nano-scribing processing method based on atomic force microscopy (AFM) probe is more suitable for small batch processing due to its simple principle, easy operation, low instrument cost, and the advantages that it can be realized in a laboratory environment. Sample processing. However, the atomic force microscope is used as a...

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Problems solved by technology

However, the atomic force microscope is used as a surface measurement and characterization device. When it is directly used in nano-processing, there are some inherent limitations, such as limited processing fineness, which is only at the level of tens of nanometers; limited processing depth, when marking hard materials. When the depth does not exceed tens of nanometers; the processing speed is low

Therefore, the limitation of the processing ability of the nanofabrication method based on the AFM probe limits its processing efficiency and application range.

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