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A kind of nano connecting device and nano wire connecting method

A technology for connecting devices and connecting methods, which is applied in nanotechnology, nanotechnology, nanostructure manufacturing, etc., can solve the problems of nanowire damage and difficulty in selecting two or more than two in a targeted manner, so as to reduce the moving distance, Save equipment cost and realize the effect of large stroke and high precision movement

Active Publication Date: 2020-09-25
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This method is easy to cause damage to the nanowires, and it is difficult to select two or more nanowires in a targeted manner and realize the connection between the nanowires to manufacture nanodevices.

Method used

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  • A kind of nano connecting device and nano wire connecting method
  • A kind of nano connecting device and nano wire connecting method
  • A kind of nano connecting device and nano wire connecting method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0056] A nano-junction device, such as Figure 1 to Figure 3 As shown, it includes a vacuum cavity 101, a near-field light generating device, a nano-manipulation device and a control device 107, the near-field light generating device includes a vacuum cavity laser emitting device and an execution end, and the nano-manipulation device includes a sample stage and an execution end Operating device; the nano-manipulating device is arranged inside the vacuum chamber 101, the execution end is connected to the execution-end operating device, the near-field light generating device and the nano-manipulating device are respectively connected to the control device 107 connected; the sample stage is suitable for moving the sample, and the execution end operation device is suitable for driving the execution end to move.

[0057] Here, the sample is a silicon wafer with nanoparticles and nanowires dispersed on its surface. In actual operation, the sample stage is provided with a sample plac...

Embodiment 2

[0060] Like the embodiment described above, this embodiment differs from it in that, as Figure 1 to Figure 4 As shown, the near-field light generating device includes: a laser emitting device, a fiber coupler 303 and an execution end, the laser emitting device is suitable for generating a laser beam, and the fiber coupler 303 is connected to the execution end through an optical fiber 304, so The fiber coupler 303 is suitable for coupling the laser beam into the optical fiber 304; the execution end is suitable for generating near-field light by using the laser beam.

[0061] The advantage of this arrangement is that the spatially free laser beam is coupled into the optical fiber 304 through the optical fiber coupler 303 , and then the optical fiber 304 is used to connect to the execution end, and the laser beam is delivered to the execution end through the optical fiber 304 .

[0062] Such as Figure 1 to Figure 4 As shown, the laser emitting device and the fiber coupler 303 ...

Embodiment 3

[0066] Like the embodiment described above, this embodiment differs from it in that, as Figure 1 to Figure 4 As shown, the laser emitting device includes a laser 301 and a laser parameter amplifier 302, the laser 301 is suitable for emitting the laser beam, the laser beam is emitted through the laser 301, and then enters the laser parameter amplifier 302, so The laser parameter amplifier 302 is suitable for adjusting the wavelength of the laser beam. The advantage of such setting is that the wavelength of the laser beam can be controlled through the setting of the laser parameter amplifier 302 .

[0067] Optionally, as in image 3 and Figure 4 As shown, the laser emitting device also includes a reflector 313, the mirror surface 315 of the reflector 313 presents a set angle with the laser beam emitted by the laser 301, and the reflector 301 is suitable for the The laser beam emitted by the laser 301 is reflected to the laser parameter amplifier 302 . The advantage of this...

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Abstract

The invention relates to the technical field of processing and manufacturing and provides a nanometer connection device and a nanowire connection method. The nanometer connection device comprises a vacuum cavity, an electron beam emission and regulation module, an electron beam objective lens, a nano operating device, a near-field light generating device, a shielding gas introduction device, an industrial personal computer and a display device. The nanowire connection method includes: acquiring nanoparticles and nanowires, uniformly distributing on a substrate of a wafer surface, and fixing the substrate to a fine positioning sample stage; positioning the substrate by a rough positioning sample stage and the fine positioning sample stage; adopting the nano operating device for positioningthe nanowires, and then positioning the nanoparticles by the nano operating device; adopting near-field light as a heat source to perform connection among different nanowires. By multifunctional structure design, completion of nanowire connection is assisted, and nanowire connection efficiency and connection quality are improved from all aspects.

Description

technical field [0001] The invention relates to the technical field of processing and manufacturing, in particular to a nano-connection device and a nano-wire connection method. Background technique [0002] Affected by scale effects, nanowires have superior mechanical, optical, and electrical properties than macroscopic materials, and are one of the basic components for realizing new nanodevices. The manipulation of nanowires and the connection between nanowires are the key technologies to realize the fabrication of nanodevices. At present, most of the nano-operation and connection technologies use laser light to irradiate multiple dispersed nanowires to connect all the nanowires. This method is easy to cause damage to the nanowires, and it is difficult to select two or more nanowires in a targeted manner and realize the connection between the nanowires to manufacture nanodevices. Contents of the invention [0003] In view of this, the present invention aims to propose ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B82B3/00B82Y40/00
CPCB82B3/0009B82Y40/00
Inventor 杨立军王根旺王扬侯超剑丁烨赵春洋
Owner HARBIN INST OF TECH
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