A micro-fluidity composite polishing mold for large-diameter easily deformable zinc sulfide optical window parts and its manufacturing method
An optical window and composite polishing technology, which is used in grinding/polishing equipment, manufacturing tools, parts of grinding machine tools, etc., can solve the problem of long processing cycle, uneven surface surface accuracy, easy deformation and multi-spectral zinc sulfide optical window Difficulty in polishing and other problems, to achieve the effect of controllable movement trajectory, regular movement trajectory, and solving the problem of smaller and blocked heat conduction grooves
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[0037] Embodiments of the present invention are described in detail below, and the embodiments are exemplary and intended to explain the present invention, but should not be construed as limiting the present invention.
[0038] Such as figure 1 As shown, a microfluidic composite polishing mold for large-diameter deformable zinc sulfide optical window parts above 600mm in this embodiment consists of a polishing mold main body, a base layer, a mold cushion layer and a polishing layer.
[0039] The expansion coefficient of the main body material of the polishing mold is 1.2×10-5 / ℃~0.8×10-6 / ℃, the modulus of elasticity is 120GPa~40GPa; the flatness of the working surface of the main body of the polishing mold is 0.2μm~8μm, and the surface roughness is 0.012μm~1μm; the cross-sectional shape of the main body of the polishing die is circular, the diameter-to-thickness ratio is 8:1-10:1, and the diameter is larger than the diameter or diagonal size of the large-caliber deformable zinc...
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