Micro-liquidity composite polishing die for large-caliber easily deformed zinc sulfide optical window parts and manufacturing method thereof
An optical window and composite polishing technology, which is applied in the direction of grinding/polishing equipment, manufacturing tools, grinding machine parts, etc., can solve the problems of uneven surface shape accuracy, long processing cycle, and easy deformation of multi-spectral zinc sulfide optical windows. Difficult polishing processing and other problems, to achieve the effect of regular motion trajectory, controllable motion trajectory, and solve the problem of shrinking heat conduction groove and plugging
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[0037] Embodiments of the present invention are described in detail below, and the embodiments are exemplary and intended to explain the present invention, but should not be construed as limiting the present invention.
[0038] Such as figure 1 As shown, a microfluidic composite polishing mold for large-diameter deformable zinc sulfide optical window parts above 600mm in this embodiment consists of a polishing mold main body, a base layer, a mold cushion layer and a polishing layer.
[0039] The expansion coefficient of the main body material of the polishing mold is 1.2×10-5 / ℃~0.8×10-6 / ℃, the modulus of elasticity is 120GPa~40GPa; the flatness of the working surface of the main body of the polishing mold is 0.2μm~8μm, and the surface roughness is 0.012μm~1μm; the cross-sectional shape of the main body of the polishing die is circular, the diameter-to-thickness ratio is 8:1-10:1, and the diameter is larger than the diameter or diagonal size of the large-diameter deformable zin...
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