Double-spectrum super-surface integrated uncooled infrared detector and manufacturing method thereof

Abstract

The invention discloses a double-spectrum super-surface integrated uncooled infrared detector and a manufacturing method thereof, relates to the technical field of infrared detection and imaging, andsolves the problems that an existing uncooled focal plane increases the thickness of an absorption layer for achieving high absorption rate, and the performance is reduced due to the increase of equivalent heat capacity. The focal plane comprises an array consisting of a plurality of picture elements, wherein each picture element sequentially comprises: a readout circuit, which is a silicon-basedor germanium-based CMOS integrated circuit with the functions of amplifying and reducing noise, and a readout electrode pair is arranged on the CMOS integrated circuit; an adiabatic microbridge, whichcomprises a microbridge deck, two microsupport structures and two microcantilever beams; a thermistor layer, which is a material with the absolute value of a temperature resistance coefficient higherthan 2%; a readout electrode is connected with the thermistor layer through a through hole; the thermistor layer is protected by a passivation insulating layer; the bispectral absorption film layer comprises a metal layer, a dielectric layer and a metal microarray; the manufacturing method is compatible with the traditional uncooled infrared detector processing technology, and the process is simple, so that large-scale and low-cost preparation are facilitated.

Description

technical field [0001] The invention relates to the technical field of infrared detection and imaging, in particular to a bispectral metasurface integrated uncooled infrared detector and a manufacturing method. Background technique [0002] Most of the current mainstream infrared detection systems are aimed at single-band infrared detectors in the atmospheric window. However, due to the different areas where the infrared system is used, the change of climate temperature, the camouflage of the target, the release of infrared decoys, etc., the information obtained by the single-band infrared detection system will drop significantly, and it may even be impossible to detect the target at all. In order to solve the above problems, two-color infrared spectroscopy detection technology is needed. [0003] Dual-spectrum infrared spectrum detection technology requires synchronous collection of two infrared spectral intensities of the target. The key to the realization of this technol...

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Problems solved by technology

[0005] In order to solve the problems existing in the prior art, the present invention provides a bispectral metasurface integrated uncooled infrared detector and a manufacturing method, aiming to break through the limitations of traditional far-infrared materials and resonant cavity structures, and to solve the problem of realizing the existing uncooled focal plane. High absorption rate increases the thickness of the absorbing layer, and the performance degradation caused by the increase of equivalent heat capacity, etc.

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