Bispectral metasurface integrated uncooled infrared detector and manufacturing method

Abstract

The bispectral metasurface integrated uncooled infrared detector and its manufacturing method relate to the field of infrared detection and imaging technology, solving the performance degradation caused by increasing the thickness of the absorbing layer and increasing the equivalent heat capacity of the existing uncooled focal plane in order to achieve high absorption rate And other issues. The focal plane includes an array composed of multiple picture elements, and each picture element sequentially includes from bottom to top: the readout circuit is a silicon-based or germanium-based CMOS integrated circuit with amplification and noise reduction functions, and the readout electrode is set on the CMOS integrated circuit Yes; the adiabatic micro-bridge includes a micro-bridge deck, two micro-support structures and two micro-cantilever beams; the thermistor layer is a material with an absolute value of temperature resistivity higher than 2%; the readout electrode is connected to the thermistor through a through hole layer connection; the passivation insulating layer protects the thermistor layer; the bispectral absorption film layer includes a metal layer, a dielectric layer and a metal microarray, and the manufacturing method involved in the present invention is compatible with the traditional uncooled infrared detector processing technology, and the process is simple , which is conducive to large-scale and low-cost preparation.

Description

technical field [0001] The invention relates to the technical field of infrared detection and imaging, in particular to a bispectral metasurface integrated uncooled infrared detector and a manufacturing method. Background technique [0002] Most of the current mainstream infrared detection systems are aimed at single-band infrared detectors in the atmospheric window. However, due to the different areas where the infrared system is used, the change of climate temperature, the camouflage of the target, the release of infrared decoys, etc., the information obtained by the single-band infrared detection system will drop significantly, and it may even be impossible to detect the target at all. In order to solve the above problems, two-color infrared spectroscopy detection technology is needed. [0003] Dual-spectrum infrared spectrum detection technology requires synchronous collection of two infrared spectral intensities of the target. The key to the realization of this technol...

AI Technical Summary

Problems solved by technology

[0005] In order to solve the problems existing in the prior art, the present invention provides a bispectral metasurface integrated uncooled infrared detector and a manufacturing method, aiming to break through the limitations of traditional far-infrared materials and resonant cavity structures, and to solve the problem of realizing the existing uncooled focal plane. High absorption rate increases the thickness of the absorbing layer, and the performance degradation caused by the increase of equivalent heat capacity, etc.

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