Non-refrigeration infrared focal plane of compound absorption film layer and preparation method thereof

Abstract

The invention provides a non-refrigeration infrared focal plane of a compound absorption film layer and a preparation method thereof, and relates to the technical field of infrared detection and imaging. The problems are solved that for an existing non-refrigeration infrared focal plane, the thickness of an absorption layer is increased to achieve high absorptivity and the performance is reduced due to increase of the equivalent heat capacity. The focal plane includes an array composed of several pixels, each pixel includes a read-out circuit, the read-out circuit is a silicon-based or germanium-based CMOS integrated circuit having the functions of amplifying and reducing noise, and a read-out electrode pair is arranged in the CMOS integrated circuit. A thermal isolation microbridge includes a micro bridge, two micro support structures and two micro cantilever beams. A thermistor layer is a material whose absolute value of the temperature resistance coefficient is higher than 2%. The read-out electrode is connected with the thermistor layer through a through hole. A passivation insulating layer protects the thermistor layer. A compound absorbing film layer includes a metal layer, adielectric layer and a metal microarray. The involved preparation method is compatible with a traditional non-refrigeration infrared detector, the process is simple and large-scale and low-cost preparation is facilitated.

Description

technical field [0001] The invention relates to the technical field of infrared detection and imaging, in particular to an uncooled infrared focal plane with a composite absorption film layer and a manufacturing method thereof. Background technique [0002] Driven by the demand and promotion of military applications, as the core components of infrared imaging systems, infrared detectors have developed rapidly in the past few decades. Security monitoring, meteorology, environment, medicine and many other fields also have a wide range of applications. [0003] Infrared detectors are mainly divided into cooled and uncooled infrared detectors. The uncooled infrared detector converts the temperature change of the absorbing layer caused by the measured infrared radiation signal into an electrical signal through the thermistor material, and then obtains the infrared information of the target. Although there is a gap in response time and sensitivity compared with cooled infrared d...

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Problems solved by technology

[0005] In order to solve the problems existing in the prior art, the present invention provides an uncooled infrared focal plane of a composite absorbing film layer and a manufacturing method, aiming at breaking through the limitations of traditional far-infrared materials and resonant cavity structures, and solving the problem that the existing uncooled focal plane is Problems such as increasing the thickness of the absorbing layer to achieve a high absorption rate, and reducing performance due to an increase in equivalent heat capacity

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