Double-sided cathode spiral ring gradual change type silicon drift detector and preparation method thereof

Abstract

The invention discloses a double-sided cathode spiral ring gradual change type silicon drift detector and a preparation method thereof; the front surface of a gradual change type detector unit and theback surface of the gradual change type detector unit are positioned on two opposite planes of a high resistance silicon substrate; the front surface of the gradual change type detector unit comprises a first gradual change type P+ cathode spiral ring and an N+ collection anode embedded in the first gradual change type P+ cathode spiral ring, wherein the first gradual change type P+ cathode spiral ring is composed of a front circular region, a front gradual change region and a front square region; the back surface of the gradual change type detector unit comprises a second gradual change typeP+ cathode spiral ring, wherein the second gradual change type P+ cathode spiral ring is composed of a back circular area, a back surface gradual change region and a back surface square region; and amiddle electrode is arranged in the center of the second gradient type P+ cathode spiral ring. A silicon dioxide layer is generated on the surface of the N-type high-resistance silicon wafer througha gettering oxidation process, and the detector pattern is transferred to a silicon dioxide layer, and then etching and ion implantation and activation on each part are carried out; and finally the damage of the detector is repaired.

Description

technical field

[0001] The invention belongs to the technical field of radiation detection, and relates to a double-sided cathode spiral ring gradient silicon drift detector and a preparation method thereof. Background technique

[0002] Silicon Drift Detector (SDD) is developed for atomic physics, nuclear physics and elementary particle physics. Now, SDD is widely used in many fields such as science, engineering and daily life, such as deep space exploration, medical imaging, particle trajectory detection in high energy physics, food safety detection, and radiation source detection for national security. The SDD is a device used to detect trajectories and determine the energy of energetic particles. These high-energy particles include those produced by nuclear decay, cosmic radiation, and particles produced by accelerator interactions. To detect radiation, detectors must interact with matter and this interaction must be recorded. SDD is through the interaction between th...

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