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Control testing device of coating ion source

A test device and ion source technology, applied in the field of ion source testing, can solve the problems of reducing the quality of the coating, low stability, electromagnetic interference of the arc source control system, etc., to ensure the quality of work, improve the ability to resist electromagnetic interference, extend The effect of service life

Pending Publication Date: 2019-06-14
ANDESON SUPERCONDUCTING RF ACCELERATOR TECHCO
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AI Technical Summary

Problems solved by technology

Optical coatings are generally produced by arc ion coating equipment. A major problem with traditional arc ion coating equipment is that the arc source control system is susceptible to electromagnetic interference from the surroundings, and its stability is not high, which reduces the coating quality.

Method used

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  • Control testing device of coating ion source

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Embodiment Construction

[0028] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention.

[0029] The present invention provides a control and test device for a coated ion source. Its working principle is to use a PLC controller with strong anti-interference ability to process data collection and control external hardware equipment, improve the ability to resist electromagnetic interference, and realize the effect of the coating ion source Accurate measurement of the working range to ensure that the coating ion source can meet the production requirements, thereby ensuring the working quality of the coating ion source.

[0030] The present invention will be further described in detail below in conjunction with examples and specific implementations.

[0031] Such as figure 1 As shown, a control and test device for a coated ion source includes a quartz pot 2 arranged in a vacu...

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Abstract

The invention discloses a control testing device of a coating ion source. A quartz pot which is arranged in a vacuum chamber is arranged, the quartz pot is connected with an argon pipeline which allows argon to pass through, an RF coil which is used for activating the argon is arranged below the quartz pot, and a grille is arranged on the upper portion of the quartz pot. According to the device, aPLC with high anti-interference capability is adopted to process data and collect and control external hardware equipment, the anti-electromagnetic-interference capability is improved, the precise measuring of the working range of the coating ion source is achieved to ensure that the coating ion source can meet production demands, and therefore the working quality of the coating ion source is ensured.

Description

Technical field [0001] The invention relates to the technical field of ion source testing, in particular to a 13.56 MHz coating ion source control test device. Background technique [0002] In the prior art, the application of optical coatings in the industrial field is more and more extensive. Because of its advantages of fast deposition speed, high ion energy, and high target ionization rate, it is widely used in the field of industrial production, involving hard tools and lamps. , Home decoration, molds, mobile phone shell stainless steel plates and other industrial manufacturing industries. Optical coatings are generally produced using arc ion coating equipment. A major problem with traditional arc ion coating equipment is that the arc source control system is susceptible to surrounding electromagnetic interference, and the stability is not high, which reduces the quality of the coating. [0003] The information disclosed in the background section is only intended to deepen th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/32C23C14/54
Inventor 张鹏蛟李俊周钦杰侯瑞周博文李文亮许世全张力平孙安
Owner ANDESON SUPERCONDUCTING RF ACCELERATOR TECHCO
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