Large-area AZO glass coating film production line

Abstract

The invention discloses a large-area AZO glass coating film production line, which comprises a coating film line and a conveying line, wherein the coating film line comprises an inlet chamber, an inlet buffer chamber, an inlet conveying chamber, a sputtering chamber, an outlet conveying chamber, an outlet buffer chamber, an outlet chamber and a quality inspection chamber, the inlet chamber, the inlet buffer chamber, the inlet conveying chamber, the sputtering chamber, the outlet conveying chamber, the outlet buffer chamber, the outlet chamber and the quality inspection chamber are sequentiallyconnected, at least a valve is arranged between the adjacent chambers, the conveying line comprises transmission rollers and a coating film quality inspection roller, the sequentially connected transmission rollers are respectively arranged in the inlet chamber, the inlet buffer chamber, the inlet conveying chamber, the sputtering chamber, the outlet conveying chamber, the outlet buffer chamber and the outlet chamber, the coating film quality inspection roller is arranged in the quality inspection chamber, the transmission roller in the outlet chamber is connected to the coating film qualityinspection roller, and the transmission rollers and the coating film quality inspection roller are used for conveying a coating film substrate. According to the present invention, with the large-areaAZO glass coating film production line, the large-batch and low-cost production of various large-area coating films can be achieved, the sputter deposition rate is high, the process has strong versatility, the diffusion path is short, no intermediate product is generated, and no element is evaporated, such that the preparation is fast, the efficiency is high, the yield rate is over 95%, and the production line is especially suitable for large-scale industrial production.

Description

Technical field [0001] The invention relates to a large-area AZO glass coating production line, which belongs to the technical field of vacuum coating. Background technique [0002] Vacuum coating technology first appeared in the 1930s, industrial applications began to appear in the 1940s and 1950s, and large-scale industrial production began in the 1980s. It has been widely used in industries such as electronics, aerospace, packaging, decoration, and hot stamping. Vacuum coating technology is a novel material synthesis and processing technology, and it is an important part of the field of surface engineering technology. Vacuum coating technology is the use of physical and chemical means to coat a solid surface with a special performance coating, so that the solid surface has wear resistance, high temperature resistance, corrosion resistance, oxidation resistance, radiation protection, conductivity, magnetic conductivity, insulation and decoration Many lights are superior to the...

AI Technical Summary

Problems solved by technology

However, its film layer is soft and cannot be tempered after coating, and the storage time of the product after etching is short

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