Processing device and method for preparing silver paste electrode by laser-induced forward transferring printing and sintering

Abstract

The invention relates to a processing device and method for preparing silver paste electrode by laser-induced forward transferring printing and sintering. The device is characterized in that a first beam expander and a second beam expander are sequentially arranged on an output laser path of a laser pulse, wherein a three-dimensional beam splitter mirror, a polarized wave plate, a polarized beam splitting plate, a second reflector, a diffractive optical element, a scanning galvanometer and a field lens are sequentially arranged on a reflecting laser path of the first reflector; a laser path output end of the field lens face a carrying unit; a second beam splitter mirror and a reflector are sequentially arranged on an output laser path of a continuous laser; a reflecting laser path of the reflector is corresponding to the three-dimensional beam splitter mirror and is reflected to the three-dimensional beam splitter mirror; the laser reflected by the three-dimensional beam splitter mirror is overlapped with a laser path transmitted by the pulse laser; an upper bearing plate and a lower bearing plate of the carrying unit are of hollow structures and are connected through a distance adjusting mechanism; a transparent substrate coated with a silver paste layer is reversely buckled to the hollow part of the upper bearing plate; and a product substrate is arranged in the hollow part of the lower bearing plate. According to the processing device and method, an electrode with high silver paste height-width ratio can be manufactured by the laser forward transferring and printing technology.

Description

technical field [0001] The invention relates to a processing device and method for producing silver paste electrodes by laser-induced forward transfer printing and sintering. Background technique [0002] At present, as a non-lithographic direct writing processing method or a kind of 3D printing technology, laser-induced forward transfer technology (LIFT) has gradually developed into an ideal method for printing metal inks and other functional materials and preparing high-precision complex patterns. With the ability to prepare microstructures, it can realize direct writing transfer and graphic production of various materials. The laser transfer printing (LDT) processing technology based on LIFT technology, which has emerged in the past five years, has the characteristics of higher efficiency and parallelization, and has a wide range of applications in precision electronic devices, organic devices, MEMS, and semiconductor wafer flip-chip packaging. . [0003] The present in...

AI Technical Summary

Problems solved by technology

The current printing of silver paste electrodes is mostly screen printing technology, and the printed silver paste lines have a low aspect ratio. If the aspect ratio is improved, two printing or electroplating methods are required,

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