The invention discloses a
focused ion beam-
electron beam fused controllable micro-
nano machining method, which is to obtain three-dimensional
beam current density distribution of the
ion beam and the
electron beam respectively by comprehensively considering aberration and
space charge effect of an actual
system, and fuse the two beams according to the spatial
layout of the
system to synthesize a synchronous
particle beam, so as to obtain high-precision two-beam fused controllable micro-
nano machining. The method comprises the following steps: at first, obtaining parameters of a source, a lens, a deflector and a sample, and calculating two-dimensional fields, three-dimensional fields and electrical parameters of the lens and the deflector; then, under a given initial condition, solving Newton-Lorentz equation set to obtain
ion (
electron) beam three-dimensional
beam current density distribution containing aberration and
ion (electron)
coulomb force effect; at last, under the condition of considering a two-
beam system assembling structure, rotating the
ion beam anticlockwise, fusing the
ion beam and the electron beam under the
coulomb force effect, so as to realize two-beam synchronous controllable
machining. The method has the
advantage that the
machining precision and quality can be improved as the electron beam controls the
ion beam current density distribution.