SOI-based micro-chromatographic column and micro-thermal conductivity detector integrated chip and preparation method thereof

Abstract

The invention provides an SOI-based micro-chromatographic column and micro-thermal conductivity detector integrated chip and a preparation method thereof. The integrated chip comprises an SOI siliconchip which is provided with substrate silicon, a buried oxide layer and top silicon; a graphical stack structure which comprises a cross network structure with a release groove arranged below, whereinthe graphical stack structure is suspended in the release groove; a cover substrate which is boned on the top layer silicon and provided with micro-grooves, wherein the graphical stack structure is arranged in the micro-grooves; a micro-channel of the micro-chromatographic column which is formed in the substrate silicon and provided with a micro-column array and is communicated with the release groove; and a bottom substrate which is bonded on the substrate silicon to form a micro-path including the micro-grooves, the release groove and the micro-channel. The micro-thermal conductivity detector and the micro-chromatographic column are respectively arranged on the top silicon and the substrate silicon of the SOI silicon chip so as to increase the design flexibility and the controllabilityof process manufacturing. The integrated chip does not need additional connecting parts and has the advantages of low dead volume and high sensitivity.

Description

technical field [0001] The invention belongs to the field of micro-electro-mechanical systems, and in particular relates to an SOI-based micro-chromatographic column and an integrated chip of a micro-thermal conductance detector and a preparation method thereof. Background technique [0002] Gas chromatograph is an important analytical instrument with a wide range of applications. Traditional gas chromatographs can only be used in laboratories due to their large size, high power consumption, and heavy weight. However, real-time, on-site, and rapid detection of complex gas components is required in the current environmental safety, production safety, food safety, and public safety monitoring, and there is an urgent need to develop a micro gas chromatograph. Chromatographic column and thermal conductivity detector are two key components of gas chromatograph. Relevant research groups at home and abroad generally adopt MEMS technology to chip chromatographic column and thermal ...

AI Technical Summary

Problems solved by technology

[0005] In view of the above-mentioned shortcoming of the prior art, the purpose of the present invention is to provide an integrated chip and preparation method of an SOI-based micro-chromatographic column and a micro-thermal conductivity detector, which is used to solve the problem of micro-chromatographic columns and micro-thermal conductivity in the prior art. Difficult to integrate a guide detector or insufficient device performance

Images