Unlock instant, AI-driven research and patent intelligence for your innovation.

Thermal grid scanning thermal wave lossless film thickness detection method

A technology for film thickness and non-destructive testing, which is applied in the direction of measuring devices, instruments, and optical devices. It can solve the problems of extremely high sampling frequency or signal sensitivity of thermal imagers, achieve low sampling frequency requirements, and reduce sampling frequency and signal sensitivity. Requirements, the effect of low signal sensitivity requirements

Active Publication Date: 2019-07-12
XI AN JIAOTONG UNIV
View PDF5 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] In view of the deficiencies in the prior art, the object of the present invention is to provide a thermal grid scanning thermal wave non-destructive film thickness detection method and its application, which overcomes the limitations of the existing thermal wave detection method on the sampling frequency or signal sensitivity of the thermal imager. Extremely demanding flaws

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Thermal grid scanning thermal wave lossless film thickness detection method
  • Thermal grid scanning thermal wave lossless film thickness detection method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0031] Comply with the above technical solutions, such as figure 1 As shown, this embodiment provides a thermal grid scanning thermal wave non-destructive film thickness detection method, the detection method steps are as follows:

[0032] Example 1 can detect ceramic thin films.

[0033] In order to facilitate the understanding of the implementation of this patent, specific application descriptions are given below for the implementation of the present invention.

[0034] The detection frequency is 0.02Hz, the wavelength of the thermal grid is 1-40cm, the size of the specimen is 40cm×4cm×1cm, and the surface is sprayed with yttria-stabilized zirconia (8wt.% YSZ) by APS to prepare a TBC coating with a thickness of 200μm.

[0035] (1) The moving grating image is generated by computer software, and the projector is used to project on the surface of the film. In order to enhance the thermal wave signal, it is better to use a traditional thermal light source projector instead of L...

Embodiment 2

[0041] Comply with the above technical scheme, use MATLAB to carry out numerical simulation analysis, and verify with the experimental results, the steps of this detection method are as follows:

[0042] Embodiment 2 can detect metal materials.

[0043] The detection frequency is 0.02Hz, the wavelength of the thermal grid is 0.1-2cm, the size of the specimen is 1cm×0.3cm×0.1cm, and the material is 405 stainless steel.

[0044] In order to facilitate the understanding of the implementation of the invention, specific application descriptions are given below for the implementation of the invention.

[0045] (1) The heat source loading form is 100*sin(0.04π*t+u*x), the initial temperature is 0, and the boundary conditions are adiabatic boundary conditions on all surfaces except the heating surface;

[0046] (2) Write the heat conduction calculation program by yourself, and get the temperature change law of each point on the surface of the test piece with time;

[0047] (3) Fit t...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses a thermal grid scanning thermal wave lossless film thickness detection method, which comprises the following steps: moving a grid heat source along a straight line at a constant speed, enabling the moving track of the grid heat source to be parallel to the plane where a film is located, and recording a film surface temperature signal through a thermal imager; analyzing thetemperature signal obtained in the step 2 through a data processing system, and fitting the amplitude and the phase of the temperature signal of each point on the surface of the film; aiming at the attribute of the measured material, pre-calibrating the change rule of the amplitude and the phase along with the thickness of the measured material; comparing the amplitude and the phase of the thermalwave signal on the surface of the film, and fitting to obtain the thickness and the thickness distribution of the film according to the calibrated thickness rule. According to the method, the thickness of the film is detected by adopting the spatially distributed steady-state thermal waves instead of thermal wave transient response signals, so that the requirement on the sampling frequency of thethermal imager is extremely low, and the requirement on the signal sensitivity is also extremely low.

Description

technical field [0001] The invention belongs to the technical field of infrared non-destructive testing, and in particular relates to a thermal grid scanning thermal wave non-destructive film thickness detection method and an application thereof. Background technique [0002] Thin film structure is widely used in industry, scientific research, life and other aspects, and it is a very important basic structure. In the semiconductor industry, for example, chips contain a large number of membrane structures; display screens are mainly thin-film structures, and the concept of flexible electronics that is rapidly developing today is also mainly composed of flexible thin films; key components such as aeroengines and gas turbine high-temperature blades are protected by thermal barrier coatings. Thermal protection, in addition to various environmental barrier coatings are typical thin film structures. There are various permeable membrane structures for air purification and water pu...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): G01B11/06
CPCG01B11/0616
Inventor 张伟旭曲直张家宬
Owner XI AN JIAOTONG UNIV
Features
  • R&D
  • Intellectual Property
  • Life Sciences
  • Materials
  • Tech Scout
Why Patsnap Eureka
  • Unparalleled Data Quality
  • Higher Quality Content
  • 60% Fewer Hallucinations
Social media
Patsnap Eureka Blog
Learn More

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2025 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com